Improved tail gas condensation separator in polysilicon production

Abstract

The invention relates to the field of reduction tail gas recovery in polysilicon production, the current separators are composed of a plurality of heat exchangers with different temperature in a distributed and horizontal distribution, thereby the energy consumption is high, and the cold amount can not be fully recovered and used. The invention provides a stereo combination type separating apparatus, a reduction tail gas liquid collector, a circulating water heat exchanger, a gas-gas heat exchanger and a Freon heat exchanger are connected in order from down to top, a reduction tail gas redistributor and a demister are arranged between the heat exchangers and at the top of the heat exchanger, the whole apparatus is in a tower structure, a reduction tail gas inlet is provided at the side surface of the reduction tail gas liquid collector, and a chlorosilane liquid outlet is separated and equipped with the bottom of the reduction tail gas liquid collector. The improved tail gas condensation separator has the advantages that the energy consumption is saved, the basic construction cost is saved, the equipment maintenance is convenient, separating effect is high, and the equipment operation cost is low.

Description

technical field [0001] The invention belongs to the field of recovery of reduction tail gas in polysilicon production, and in particular relates to a method for condensation and separation of reduction tail gas. Background technique [0002] In the polysilicon production process, the reduction tail gas condensation separation system is to separate the condensable chlorosilane from the non-condensable hydrogen and most of the hydrogen chloride in the reduction tail gas. [0003] The traditional exhaust gas recovery method is as attached figure 1 Shown is that the reduction tail gas is gradually cooled down through the distributed horizontally distributed circulating water heat exchanger, air-gas heat exchanger, frozen brine heat exchanger and Freon heat exchanger to achieve the purpose of separation. This method requires a large amount of cooling capacity to separate the condensable components from the non-condensable components in the tail gas, which requires not only a Fre...

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Problems solved by technology

[0004] The object of the present invention is to solve the above-mentioned high energy consumption problem, and provide a tail gas condensation and separation device in polysilicon production, which uses the cooling capacity and h

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