Growth method of coated conductor DyBCO superconductive layer and DyBCO-coated conductor

A technology of coated conductors and growth methods, applied in the usage of superconductor elements, coatings, superconducting devices, etc., can solve the problems of limited thickness of YBCO film, reduced superconducting current carrying capacity, and difficulty in making superconducting films, etc. , to achieve the effect of easy control of process parameters, increase of superconducting current-carrying capacity, and overcoming thickness effect

Inactive Publication Date: 2014-03-05
NANJING UNIV OF POSTS & TELECOMM
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Problems solved by technology

The method of preparing YBCO superconducting layer using trifluoroacetate (Trifluoro-acetate) as a precursor (TFA-MOD) is prone to defects such as macroscopic cracks due to the decomposition of COO-roots in TFA, film weight reduction and volume shrinkage, etc. The thickness of the YBCO film obtained by this process is limited
However, the coating conductor superconducting layer obtained by moderately increasing polyethylene-ethylene glycol (polyethylene glycol) organic matter in the precursor solvent to increase the film thickness has a serious thickness effect, and its superconducting current-carrying capacity increases with the thickness of the superconducting layer. increase but decrease
At present, the vacuum growth method is mainly pulsed laser deposition (PLD), but it also has some disadvantages. First, the atomic-scale deposition mechanism makes the film growth rate slower; second, there is a film thickness effect, which makes it difficult to make a texture with a thickness of more than 2 μm. superconducting thin film

Method used

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  • Growth method of coated conductor DyBCO superconductive layer and DyBCO-coated conductor
  • Growth method of coated conductor DyBCO superconductive layer and DyBCO-coated conductor
  • Growth method of coated conductor DyBCO superconductive layer and DyBCO-coated conductor

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Embodiment 1

[0027] In this embodiment, a DyBCO superconducting layer with a thickness of 1 μm is prepared on a metal substrate with a cubic textured oxide isolation layer. The conventional magnetron sputtering deposition process is adopted and carried out in a magnetron sputtering equipment. The specific process is as follows:

[0028] (1) Install the DyBCO target on the target holder in the reaction chamber;

[0029] (2) Use 99.99% acetone, alcohol and deionized water in order to ultrasonically clean the metal substrate with a cubic texture oxide isolation layer, and place the cleaned substrate in the heating device of the magnetron sputtering reaction chamber on standby;

[0030] (3), vacuumize the reaction chamber to 5×10 -4 Pa, heat the metal substrate to 600°C-700°C, fill it with argon and oxygen after 20-30 minutes until the cavity pressure is stable at 30Pa-60pa, and the ratio of oxygen to argon is 1:2-1:3. The DyBCO superconducting layer was deposited by magnetron sputtering, ...

Embodiment 2

[0033] In this embodiment, a DyBCO superconducting layer with a thickness of 3 μm is prepared on a metal substrate with a cubic textured oxide isolation layer. The conventional magnetron sputtering deposition process is adopted and carried out in a magnetron sputtering equipment. The specific process is as follows:

[0034] The preparation method of the present embodiment is different from embodiment 1 except that step (3), all the other repeat the steps in embodiment 1, concrete process is as follows:

[0035] (1), repeat step (1) among the embodiment 1;

[0036] (2), repeat step (2) among the embodiment 1;

[0037] (3), vacuumize the reaction chamber to 5×10 -4 Pa, heat the metal substrate to 600°C-700°C, fill it with argon and oxygen after 20-30 minutes until the cavity pressure is stable at 30Pa-60pa, the ratio of oxygen to argon is 1:2-1:3, using magnetron Sputtering begins to deposit the DyBCO superconducting layer, the sputtering time is 10 hours, and the thickness ...

Embodiment 3

[0040] In this embodiment, a DyBCO superconducting layer with a thickness of 5 μm is prepared on a metal substrate with a cubic textured oxide isolation layer. The conventional magnetron sputtering deposition process is adopted and carried out in a magnetron sputtering equipment. The specific process is as follows:

[0041] The preparation method of the present embodiment is different from embodiment 1 except that step (3), all the other repeat the steps in embodiment 1, concrete process is as follows:

[0042] (1), repeat step (1) among the embodiment 1;

[0043] (2), repeat step (2) among the embodiment 1;

[0044] (3), vacuumize the reaction chamber to 5×10 -4 Pa, heat the metal substrate to 600°C-700°C, fill it with argon and oxygen after 20-30 minutes until the cavity pressure is stable at 30Pa-60pa, the ratio of oxygen to argon is 1:2-1:3, using magnetron Sputtering begins to deposit the DyBCO superconducting layer, the sputtering time is 15 hours, and the thickness ...

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Abstract

The invention provides a growth method of a coated conductor DyBCO superconductive layer and a DyBCO-coated conductor, and specifically relates to a method of preparing the DyBCO superconductive layer on a metal base band with a cube texture oxide isolating layer, and the method can effectively overcome thickness effect of a YBCO superconductive layer and improve superconductive current-carrying capability. The preparation method utilizing a magnetron sputtering deposition technology comprises the following steps: vacuum-pumping for a reaction chamber until vacuum degree is smaller than and equal to 5*10<-4>Pa, heating the metal base band to 600 DEG C-700 DEG C; 20 minutes-30 minutes later, charging an argon gas and an oxygen gas until gas pressure of a cavity is stabilized to 30 Pa-60 Pa, wherein a proportion of the oxygen gas to the argon gas is 1:2-1:3; taking DyBCO as a target material to start sputtering, cooling to 400 DEG C-450 DEG C after the sputtering is completed, charging the oxygen gas until the gas pressure is maintained at 700 mbar-750 mbar, and carrying out annealing treatment for 40 minutes-80 minutes; and cooling to the room temperature after film-coating is ended to obtain the DyBCO superconductive layer growing on the metal base band with the cube texture oxide isolating layer. The method disclosed by the invention can be utilized to produce the coated conductor with thickness greater than 2mu m of the DyBCO superconductive layer; and the coated conductor does not exist in the prior art.

Description

technical field [0001] The invention relates to a method for growing a coated conductor DyBCO superconducting layer, in particular to a method for growing a DyBCO superconducting layer on a metal substrate of a cubic textured oxide isolation layer by magnetron sputtering, and to using the method produced a DyBCO-coated conductor. Background technique [0002] Currently, the power supply is becoming increasingly tight, yet a large amount of power is wasted on traditional cables. If superconducting strips are used, not only these losses can be completely avoided, but also a large amount of metal materials can be saved. [0003] The current research hotspot of superconducting tape is the second-generation high-temperature superconducting tape based on the YBCO (yttrium-barium-copper-oxygen) system. At present, the main method for preparing the second-generation Y-series high-temperature superconducting tape is the method of coating the conductor. The bottom layer of the coate...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06H01B12/06
CPCY02E40/642Y02E40/60
Inventor 刘胜利王海云厉建峥
Owner NANJING UNIV OF POSTS & TELECOMM
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