Growing method of Y<1-x>RE<x>BCO superconducting layer of coated conductor through magnetron sputtering method

A magnetron sputtering and coating conductor technology, which is applied in the usage of superconductor elements, coating, sputtering plating, etc., can solve the problems of critical current density and critical current reduction, reduce production costs, and process parameters are easy to control , The effect of simple process

Inactive Publication Date: 2016-04-27
NANJING UNIV OF POSTS & TELECOMM
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AI Technical Summary

Problems solved by technology

However, the coated conductor based on the YBCO system has a thickness effect, that is, when the thickness is greater than a certain value (about 1 μm), the critical current density

Method used

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  • Growing method of Y&lt;1-x&gt;RE&lt;x&gt;BCO superconducting layer of coated conductor through magnetron sputtering method
  • Growing method of Y&lt;1-x&gt;RE&lt;x&gt;BCO superconducting layer of coated conductor through magnetron sputtering method

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0020] This embodiment is to prepare a Y with a thickness of 1 μm on a lanthanum aluminate (LAO) substrate. 1-x RE x BCO superconducting layer. The conventional magnetron sputtering deposition process is adopted and carried out in a magnetron sputtering equipment. The specific process is as follows:

[0021] (1) The four metal oxide powders of yttrium oxide, gadolinium oxide, barium oxide, and copper oxide are mixed together according to the molar ratio of metal cations: Y:Gd:Ba:Cu=0.9:0.1:2:3 and used for spherical grinding machine grinding for 5 hours;

[0022] (2) The powder is compressed and molded by dry pressing molding technology, the size of the abrasive tool used is 5cm in diameter, and the molding pressure is 8-14kg / cm 2 ;

[0023] (3) Put the pressed block sample into the furnace, raise the temperature to 850-900°C at a rate of 10°C / min, and keep this temperature for 24 hours, and then raise it to 1050-1100°C at a rate of 10°C / min Keep it for 1 hour, then cool...

example 2

[0028] This embodiment is to prepare a Y with a thickness of 2 μm on a lanthanum aluminate (LAO) substrate. 1-x RE x BCO superconducting layer. The conventional magnetron sputtering deposition process is adopted and carried out in a magnetron sputtering equipment. The specific process is as follows:

[0029] (1) The four metal oxide powders of yttrium oxide, gadolinium oxide, barium oxide, and copper oxide are mixed together according to the molar ratio of metal cations: Y:Gd:Ba:Cu=0.7:0.3:2:3 and used for spherical grinding machine grinding for 7 hours;

[0030] (2), repeat step (2) among the embodiment 1;

[0031] (3), repeat step (3) among the embodiment 1;

[0032] (4), repeat step (4) in embodiment 1;

[0033] (5) Vacuumize the magnetron sputtering chamber to a degree of vacuum less than or equal to 5×10 -4 Pa, heat the metal substrate to 600°C-700°C, fill it with argon and oxygen after 20-30 minutes until the chamber pressure is stable at 30-60Pa, the ratio of oxy...

example 3

[0036] This embodiment is to prepare a Y with a thickness of 3 μm on a lanthanum aluminate (LAO) substrate. 1-x RE x BCO superconducting layer. The conventional magnetron sputtering deposition process is adopted and carried out in a magnetron sputtering equipment. The specific process is as follows:

[0037] (1) The four metal oxide powders of yttrium oxide, gadolinium oxide, barium oxide and copper oxide are mixed together according to the molar ratio of metal cations: Y:Gd:Ba:Cu=0.4:0.6:2:3 and used for spherical grinding Machine grinding for 9 hours;

[0038] (2), repeat step (2) among the embodiment 1;

[0039] (3), repeat step (3) among the embodiment 1;

[0040] (4), repeat step (4) in embodiment 1;

[0041] (5) Vacuumize the magnetron sputtering chamber to a degree of vacuum less than or equal to 5×10 -4 Pa, heat the metal substrate to 600°C-700°C, fill it with argon and oxygen after 20-30 minutes until the chamber pressure is stable at 30-60Pa, the ratio of oxyg...

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Abstract

The invention provides a growing method of a Y<1-x>RE<x>BCO superconducting layer of a coated conductor and particularly relates to a method for preparing the Y<1-x>RE<x>BCO superconducting layer on a lanthanum aluminum oxide (LAO) substrate through a magnetron sputtering method. The thickness effect of a YBCO superconducting layer is overcome effectively, and the superconducting current-carrying capability is improved. Firstly, a Y<1-x>RE<x>BCO magnetron sputtering target is prepared by partially replacing Y with Sm or Gd; then a reaction chamber is vacuumized until the vacuum degree is smaller than or equal to 5*10<-4> Pa, and the LAO substrate is heated to 600-700 DEG C; after 20-30 minutes, the chamber is filled with argon and oxygen, air pressure is stabilized at 30-60 Pa, the ratio of the oxygen to the argon is 1:2-1:3, and sputtering is started by taking Y<1-x>RE<x>BCO as the target. After sputtering is completed, the temperature is decreased to 400-450 DEG C, the chamber is filled with oxygen until the air pressure is maintained at 700-750 mbar, and annealing treatment is carried out for 40-80 minutes. After film coating is completed, the temperature is decreased to the room temperature, and the Y<1-x>RE<x>BCO superconducting layer growing on the LAO substrate is obtained. By means of the method, the coated conductor with the thickness of the Y<1-x>RE<x>BCO superconducting layer reaching 3 microns can be produced.

Description

technical field [0001] The invention belongs to the field of superconducting layer preparation, in particular to the field of preparing coated conductor YBCO by a magnetron sputtering method. Background technique [0002] With the development of modern society and the increase of electricity demand in various industries, we have higher and higher requirements for transmission cables, but the current transmission cables generally consume a lot of power during the transmission process, causing unnecessary waste. If superconducting strips are used for transmission, not only the loss of electric energy can be avoided, but also a large amount of metal materials can be saved. [0003] The research hotspot of superconducting tape today is the second-generation high-temperature superconducting tape based on the YBCO (yttrium-barium-copper-oxygen) system. At present, the main method for preparing the second-generation Y-series high-temperature superconducting tape is the method of co...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/08H01B12/06
CPCC23C14/08C23C14/35H01B12/06Y02E40/60
Inventor 何茂赟刘胜利王海云
Owner NANJING UNIV OF POSTS & TELECOMM
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