Method and measuring device for detecting molten silicon liquid level of a single crystal silicon crystal pulling furnace
A technology of liquid level detection and measurement device, which is applied in the fields of self-melting liquid pulling method, single crystal growth, chemical instruments and methods, etc.
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[0035] The present invention will be further described in detail below in conjunction with specific embodiments, which are explanations of the present invention rather than limitations.
[0036] The triangular displacement measurement method is named because the incident light and the reflected light form a triangle. Its principle is to emit a beam of light from the light source to the surface of the measured object, and observe the reflected light through imaging in another direction and position. The position of the point, so that the displacement of the surface of the measured object can be obtained.
[0037] see Figure 1 to Figure 6 , a method for detecting the molten silicon liquid level of a single crystal silicon crystal pulling furnace in the present invention, a line laser and a camera are installed on the observation port of the single crystal silicon furnace, and the laser beam emitted by the laser is irradiated to the heat shield of the crystal pulling furnace thr...
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