Double-cavity valveless piezoelectric pump of tee joint structure

A valveless piezoelectric pump and piezoelectric vibrator technology, which is applied to pumps with flexible working elements, components of pumping devices for elastic fluids, pumps, etc., can solve the problem of increasing the difficulty of making flow channels and the energy efficiency of micropumps. High energy consumption, limited net flow, etc., to avoid boundary layer separation and wall-attached flow phenomenon, strong anti-electromagnetic interference ability, and reduce energy loss

Inactive Publication Date: 2014-03-19
JIANGSU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The conical tube has a simple structure and is easy to design and process, but its difference in forward and reverse flow resistance is small, resulting in low efficiency of the micropump, and it is prone to flow separation and attachment at high driving frequency and large cone angle. Wall flow phenomenon; Tesla tube is also called special-shaped tube, its main structure is composed of straight channel and curved channel. When the fluid flows back and forth, due to the difference in the length of the channel and the inertia effect of the fluid, the net flow in the direction of the outlet is generated, but The difference in forward and reverse flow resistance is also very small, and the net flow obtained by the micropump in one working cycle is limited; the essence of the vortex tube is to add a series of triangular or circular vortex areas on the wall of the two-dimensional plane conical tube, these The triangular vortex area and the conical flow tube together form a vortex channel, but the existence of the vortex surface increases the difficulty of making the flow channel, and the forward and reverse flow resistance of this flow tube is very large, so that the micropump can High consumption and low efficiency; three-way pipes include Y-shaped pipes and V-shaped pipes, etc., and the Y-shaped pipe is composed of a confluence pipe and two diversion pipes to form a Y shape. The size of the confluence pipe and the distribution pipe of equal cross-section rectangle is large, which is not conducive to micro-integration; the "V"-shaped pipe is composed of a rectangular pipe with equal cross-section as the confluence pipe and two diffuse (shrink) shunt pipes, but due to its inlet and outlet The flow tube and the pump cavity are not on the same plane, resulting in a relatively complex structure and difficult processing; the three-way tube reduces the forward flow resistance to a certain extent and increases the reverse flow resistance, making the micropump work in one A higher net flow rate is obtained in the positive direction during the cycle, but it is also suitable for the case of a small angle of the manifold at lower frequencies

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  • Double-cavity valveless piezoelectric pump of tee joint structure

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Embodiment Construction

[0022] refer to Figure 1~Figure 8 , the present invention includes a pump body 8, a pump cover 2 and piezoelectric vibrators 3, 4, the material of the pump body 8 is a silicon chip, the material of the pump cover 2 is glass, and the pump body 8 and the pump cover 2 are combined in an anodic bonding process. Together, the two piezoelectric vibrators 3 and 4 are respectively fixed and bonded on the top of the pump cover 2 with an adhesive.

[0023] On the pump cover 2, the pump inlet 1, the pump outlet 5 and the upper half of the pump chambers 10, 11 are processed by laser processing technology, and the two piezoelectric vibrators 3, 4 are respectively located directly above the two pump chambers 10, 11. On the pump body 8, the inlet buffer chamber 6, the outlet buffer chamber 9, the inlet flow pipe 7, the outlet flow pipes 12, 13 and the lower half of the pump chamber 10, 11 are processed by dry etching process, and the inlet buffer chamber 6 and The centerlines of the outlet...

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Abstract

The invention discloses a double-cavity valveless piezoelectric pump of a tee joint structure. An inlet cushioning cavity, an outlet cushioning cavity, an inlet flow pipe, two outlet flow pipes and the lower half parts of two pump cavities are arranged on a pump body. The inlet flow pipe is formed by a convergence taper pipe and two flow division taper pipes which are symmetrically arranged relative to the center line of the convergence taper pipe in a communicated mode. The convergence taper pipe of the inlet flow pipe is communicated with the inlet cushioning cavity, one ends of the two flow division taper pipes are communicated with the big end of the convergence taper pipe, and the other ends of the two flow division taper pipes are respectively communicated with one of the two pump cavities. One ends of the two outlet flow pipes are respectively communicated with one of the two pump cavities, and the other ends of the two outlet flow pipes are both communicated with the outlet cushioning cavity. The inlet cushioning cavity is communicated with a pump inlet, and the outlet cushioning cavity is communicated with a pump outlet. Two piezoelectric vibrators 3 are loaded with alternating voltage signals of the same phase respectively, the flowing discharge capacity of fluid in the forward direction is enhanced, the phenomena of separation of boundary layers and wall-attached flow due to flowing at a large taper angle and with high frequency are avoided, energy loss is lowered, and the efficiency of the valveless piezoelectric pump is improved.

Description

technical field [0001] The invention relates to the field of microfluid transmission and control and micromechanical technology, in particular to a double-cavity valveless piezoelectric pump with a three-way structure. Background technique [0002] Piezoelectric pump is a kind of mechanical micropump, which belongs to positive displacement pump. It is widely used in the fields of micro-transportation of drugs, cell separation, cooling of electronic products, micro-injection of fuel, chemical micro-analysis, and transition control of pipeline flow. At present, piezoelectric pumps are mainly divided into two types: valved piezoelectric pumps and valveless piezoelectric pumps. Valveless piezoelectric pumps have no movable valves, and have a simple structure, which is more suitable for miniaturization and miniaturization, and can meet the needs of high-frequency applications. Work requirements, overcome the shortcomings of valved piezoelectric pumps that cause noise when the flo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/04F04B53/16
Inventor 何秀华蔡盛川邓志丹
Owner JIANGSU UNIV
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