Hydrophilic member and method for producing same
A technology of hydrophilicity and components, applied in separation methods, chemical instruments and methods, catalyst activation/preparation, etc., can solve problems such as poor durability and fragile structure, and achieve the effect of improved durability
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Embodiment 1
[0171] (1) First intermediate layer forming step
[0172] As a substrate, soda lime glass (green glass) (thickness: 2 mm) for automobile windshields was prepared. On this soda lime glass, SiO was formed as an intermediate layer by magnetron sputtering (device: SRV-4300 manufactured by Shinko Seiki Co., Ltd.) 2 Film (thickness: 50 nm). At this time, using SiO 2 The plate (disc) is used as the target, in vacuum, the distance between the substrate and the target is 100mm, and the pressure is 5×10 -4 Sputtering was carried out under the conditions of Pa, film formation rate of 3 nm / min, input power of 100 W, and substrate temperature of 25°C.
[0173] (2) Formation process of photocatalyst coating film
[0174] (a) Film formation of catalytic activity promoter (formation of catalytic activity promotion layer)
[0175] In the above SiO 2 On the film, a CuO film (thickness: 0.5 nm) was formed by continuous sputtering using a magnetron sputtering method (apparatus: Model SRV-43...
Embodiment 2
[0182] In addition to making SiO 2 A member for evaluation was obtained in the same manner as in Example 1 except that the thickness of the film was 20 nm.
Embodiment 3
[0184] In addition to making SiO 2 A member for evaluation was obtained in the same manner as in Example 1 except that the thickness of the film was 100 nm.
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