Automatic layout method for power/ground TSV positions in 3D integrated circuit
An integrated circuit, automatic layout technology, applied in electrical digital data processing, special data processing applications, instruments, etc., can solve problems such as electric field coupling noise, interference circuits, affecting the effective work of 3D integrated circuits, etc. The effect of small capacitive noise
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[0031] The present invention will be further described below in conjunction with accompanying drawing.
[0032] Such as figure 1Shown is a schematic cross-sectional structure diagram of a 3D integrated circuit chip, the 3D integrated circuit chip includes signal TSV1, powerTSV2, groundTSV3, top chip 6, bottom chip 7, standard unit 8, metal interconnection 9 and substrate 10; the present invention includes five units, respectively input unit, linear layout unit, shielding unit, grid distribution unit, power supply layout unit; 3D integrated circuit in the present invention is a kind of three-dimensional chip structure, and each layer of 3D integrated circuit is 2D chip, and is connected vertically by TSV; the top-level chip 6 and the low-level chip 7 constitute the general structure of the chip; the standard unit 8 in the chip is the basic component for realizing signal interconnection in the integrated circuit, and the metal interconnection line 9 Complete the interconnection...
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