AMHS (automated material handling system) stocker system

Abstract

The invention discloses an AMHS (automated material handling system) stocker system comprising at least one stocking device arranged in an AMHS stocker. Each stocking device is provided with a rotary sinuous stocking table which is driven by a transmission device to rotate in a sinuous manner. A plurality of stocking brackets for holding silicon wafer boxes are arranged on each stocking table. The rotary sinuous stocking tables are adopted, so that the silicon wafer boxes in the stocker can move; silicon wafer box grippers are provided, so that the silicon wafer boxes on a transporter can be handled fast and can move to any position of the stocking tables or between the different stocking tables, the time of running process of the transporter for handling is saved, and overall efficiency of an AMHS is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor integrated circuit material conveying equipment, in particular to a temporary storage area system of an automatic material conveying system. Background technique [0002] With the development of semiconductor technology, 300mm silicon wafers have gradually replaced 200mm silicon wafers and become the mainstream, and the weight of each silicon wafer box loaded with silicon wafers has also changed from about 4 kg to about 9 kg. Therefore, manual transport is still carried by manpower, which not only reduces efficiency, but also has the possibility of personal injury of the transporter. At the same time, semiconductor manufacturing has increasingly stringent requirements on plant utilization and production cycle, and the importance of Automated Material Handling Systems (AMHS) as a link to transport silicon wafers between various manufacturing modules is also increasing. stand out. [0003] T...

AI Technical Summary

Problems solved by technology

[0004] It can be seen that in the prior art, the silicon wafer boxes temporarily stored in the temporary storage area are all accessed by the OHT transport vehicle. For example, the transport vehicle A picks up the silicon wafer box and temporarily stores it in the P position of the temporary storage area, which is located far away from the P position. The machine in the aisle at position Q needs to use the wafer cassette, then the transport vehicle B needs to travel at least the distance P→Q (assuming that the transport vehicle B is already at position P), plus other transport vehicles that may be in the path, the transport Car B takes a lot of time to pick up the wafer box

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