X-ray double spectrometer

Abstract

The invention relates to an X-ray double spectrometer. The double spectrometer comprises an X-ray tube with 4 kw of power, a three-dimensional sample mobile station, a CCD (Charge Coupled Device) camera, a capillary X-ray translucent mirror, a semiconductor X-ray detector and an electronics system I, a plane crystal, an NaI X-ray detector and an electronics system II, a collimation slit I and a collimation slit II, wherein X-ray energy spectrum and wave spectrum share one X-ray tube with 4 kw of high power; the capillary X-ray translucent mirror is fixed in front of the semiconductor X-ray detector and the electronics system I, and is positioned in the inclined upper side of a sample with an angle of 67.5 degrees to align to the sample for collecting X-rays of element characteristic energies excited by microcell elements of the sample; the three-dimensional sample mobile station controlled by a computer moves the sample to implement the line scanning or the surface scanning for analyzing interested microcells in the sample.

Description

technical field [0001] The invention relates to an X-ray fluorescence analysis spectrometer, in particular to an X-ray bispectrometer. Background technique [0002] X-ray fluorescence analysis spectrometer is an important analytical method for non-destructive analysis of element content in various samples. Its principle is that the X-ray beam emitted from the X-ray source (such as X-ray tube, etc.) The electrons in the inner layer of the nucleus of the contained elements are excited by the irradiated X-rays to leave vacancies, and the electrons outside the nucleus jump to the inner layer vacancies and emit X-rays with characteristic energy. The X-ray detector accepts the characteristic X emitted by the elements in the sample. After the energy of the ray passes through electronic systems such as preamplifiers, main amplifiers, and multi-channel analyzers, the element types and element contents are determined according to the characteristic energy emitted by the elements in th...

AI Technical Summary

Problems solved by technology

Among them, the energy dispersive X-ray fluorescence spectrometer has a fast analysis speed, and it is easy to realize line scanning and surface scanning analysis, but the energy resolution is low, the energy spectrum background is high, and the detection limit is high; while the wavelength dispersive X-ray fluorescence analysis has high resolution and low analysis background. Low, low detection limit, but slow analysis speed, difficult to achieve line scan and area scan analysis

[0003] In order to realize the simultaneous measurement of X-ray energy spectrum and wave spectrum, the existing dual-spectrometer equipped with energy spectrometer and wave spectrometer simply combines a set of X-ray fluorescence energy spectrum and a set of X-ray spectrum together. Two X-ray tubes and two X-ray detectors must be equipped at the same time. The equipment is complex, the overall volume is large, and the price is high. In addition, the existing bispectrometer cannot analyze and detect small-particle samples or specific micro-regions in the sample. limited precision

Although the application numbers 200810116613.6 and 200920145676.4 both proposed the use of capillary X-ray lens to analyze the micro-area of ​​the sample, the above two patents both use the capillary full lens to converge the X-ray beam excited by the low-power X-ray tube below 50 watts into a Small points, to excite the micro-area of ​​the sample, the detector detects the element signal of the entire micro-area, still cannot realize the simultaneous analysis of the energy spectrum and the wave spectrum, even if the energy spectrum and the wave spectrum are simultaneously analyzed on the basis of the above two patents, it is necessary to increase X X-ray tubes and corresponding detectors inevitably need to increase the complexity of the equipment

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