Heating evaporation source for organic materials

Abstract

The invention discloses a heating evaporation source for organic materials. The heating evaporation source comprises an evaporation chamber as well as a crucible and heaters which are arranged in the evaporation chamber, wherein the heaters comprise a heating wire distributed on the periphery of the crucible, and in addition, the distribution density of the heating wire at the upper part of the crucible is larger than that of the heating wire in the middle and at the lower part of the crucible. According to the heating evaporation source, one heating wire is used, a group of heaters are matched, two heating sections are divided, the heating wire in the middle and at the lower part of the crucible is loosely arranged while the heating wire at the upper part of the crucible is closely arranged, due to the difference of distribution densities of the heating wire in the middle and at the lower part of the crucible as well as at the upper part of the crucible, the upper part of the crucible is at a higher temperature, and The temperature of the upper part of the crucible is higher than that of the bottom of the crucible, so that evaporation materials cannot coagulate at an upper port of the crucible, and the problem of blockage caused by material coagulation is solved; in addition, only one heating wire is needed, so that only one group of heaters are needed, and the cost is lower.

Description

technical field [0001] The invention relates to a manufacturing process of an AMOLED display screen, in particular to an organic material heating evaporation source with a stable evaporation rate. Background technique [0002] Most of the organic material heating evaporation sources are only equipped with one set of heaters 22, such as figure 1 As shown, since the top of the crucible 21 has an opening, it is easy to dissipate heat, causing the evaporated material to condense easily on the top of the crucible 21, and the condensed material on the top of the crucible 21 will block the evaporation path of the evaporated material at the bottom of the crucible 21, making the evaporation speed Unstable, the entire crucible mouth will be completely blocked after a long time, so that the evaporation cannot continue. [0003] An ideal vacuum evaporation source needs to have a stable evaporation rate, so that the method of co-evaporation can be used to prepare OLED devices with a spe...

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a kind of heater that can use a group of heaters to maintain a high temperature state on the upper edge of the crucible, so that the material does not condense on the upper edge of the crucible, which not only solves the problem of material condensation and blockage, but also does not increase the cost. Organic material heating evaporation source

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