Evaporation source assembly of organic light-emitting diode (OLED) evaporator

A technology of evaporation source and evaporation machine, which is used in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problem of abnormal film thickness or doping ratio of organic materials, abnormal OLED efficiency and light color, and cost a few Ten hours and other problems to achieve the effect of improving the dredging efficiency, ensuring the evaporation effect and saving time

Active Publication Date: 2014-04-23
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The local organic material film thickness or doping ratio is abnormal, resulting in abnormal OLED efficiency and light color
In this case, the only way to cool down the OLED material to room temperature is to open the chamber of the vapor deposition machine. After dealing with the evaporation source of the plug hole, close the chamber of the vapor deposition machine and evacuate to 1.0E-5Pa to start heating. Organic materials, so that the coating rate is stable, usually this process takes tens of hours, which has a serious impact on production planning

Method used

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  • Evaporation source assembly of organic light-emitting diode (OLED) evaporator
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  • Evaporation source assembly of organic light-emitting diode (OLED) evaporator

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Embodiment Construction

[0030] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.

[0031] see figure 2 and image 3 , the present invention provides an evaporation source assembly of an OLED evaporation machine, comprising: a carrying platform 2, several evaporation crucibles 4 arranged on the carrying platform 2 and a dredging mechanism 6 arranged on the carrying platform 2, the dredging mechanism 6 includes a vertical arm 62, a cross arm 64 vertically connected to one end of the vertical arm 62, and a probe 66 vertically connected to the free end of the cross arm 64. Rotate, control the probe 66 to dredge the air outlet of the evaporation crucible 4 through the cross arm 64 and the vertical arm 62, and then can dredge the air outlet of the evaporation crucible 4 without opening the chamber of the evaporation machine, eff...

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Abstract

The invention provides an evaporation source assembly of an organic light-emitting diode (OLED) evaporator. The evaporation source assembly comprises a bearing platform (2), a plurality of evaporation crucibles (4) and a dredging mechanism (6), wherein the plurality of evaporation crucibles (4) are arranged on the bearing platform (2); the dredging mechanism (6) is arranged on the bearing platform (2), and comprises a vertical arm (62), a cross arm (64) and a probe (66); the cross arm (64) is vertically connected to one end of the vertical arm (62); the probe (66) is vertically connected with the free end of the cross arm (64); the vertical arm (62) is arranged on the bearing platform (2) in a scalable manner, and can rotate opposite to the bearing platform (2); the probe (66) is controlled to dredge gas outlets of the evaporation crucibles (4) through the cross arm (64) and the vertical arm (62). By adopting the evaporation source assembly of the OLED evaporator, disclosed by the invention, the gas outlets of the evaporation crucibles can be dredged under the condition of not opening a cavity of the evaporator by providing the dredging mechanism, the time is saved, the dredging efficiency is effectively improved, and the utilization rate of the evaporator is also increased.

Description

technical field [0001] The invention relates to the field of evaporation process, in particular to an evaporation source component of an OLED evaporation machine. Background technique [0002] OLED is a new generation of solid-state self-luminous display technology. Compared with liquid crystal display, OLED has the advantages of ultra-thin, high responsiveness, high contrast, and low power consumption. In recent years, the speed of industrialization has advanced by leaps and bounds. Samsung has applied AMOLED displays to its own smartphones and has gained a very good market. [0003] see figure 1 , is a schematic structural view of an existing OLED, which includes: a substrate 100, an OLED device 300 formed on the substrate 100, and a package cover 500 attached to the substrate 100, and the OLED device 300 includes a substrate 100 formed on the substrate 100. The anode 302 on the top, the organic functional layer 304 formed on the anode 302 and the cathode 306 formed on t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243C23C14/12
Inventor 邹清华
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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