A Chip-Dielectric Filled Horn Antenna Applied to Terahertz Band Phased Array

Abstract

The invention discloses a chip-medium filling horn antenna applied to a terahertz wave band phase array. The problems that a slice-mounted antenna is low in radiation efficiency and cannot perform end-fire easily and the horn antenna is large in size and cannot form an array easily are solved. The horn antenna comprises the slice-mounted antenna, a rectangular waveguide connected with the slice-mounted antenna and a horn antenna body connected with the rectangular waveguide. A transition cavity is further connected between the slice-mounted antenna and the rectangular waveguide, the direction of a narrow edge of the rectangular waveguide and the polarization direction of the slice-mounted antenna are consistent, and the rectangular waveguide works on a master die (a TE10 die). The transition cavity, the rectangular waveguide and the horn antenna are filled with mediums, and the mediums filling the rectangular waveguide and the mediums filling the horn antenna are identical. An LBE process is adopted to perform etching on a silicon substrate of the slice-mounted antenna, the end-fire can be formed, radiation efficiency of the slice-mounted antenna is improved, the size of the rectangular waveguide and the size of a horn are reduced, the array forming requirements are met, and the chip-medium filling horn antenna is suitable for being popularized and used in large scales.

Description

technical field [0001] The invention belongs to the technical fields of electronics, millimeter waves, and terahertz (100GHz-10THz), and specifically relates to a chip-dielectric filled horn antenna applied to a phased array in the terahertz band. Background technique [0002] In recent years, the study of terahertz waves has received great attention worldwide, and the development of technologies for the last band of the electromagnetic spectrum that has not been widely used is becoming more and more important. At the same time, with the development of integrated circuits, it has become a reality to integrate terahertz transceiver components on tiny chips. [0003] The antenna, as the first component of the receiving end and the last component of the transmitting end, must be connected to the circuit, so in order to ensure maximum power transmission, impedance matching is an essential link; in addition, since the antenna is implemented on a conventional PCB, gold Wire bondi...

AI Technical Summary

Problems solved by technology

[0005] The invention provides a chip-dielectric filled horn antenna applied to a phased array in the terahertz band, which solves the problems of low radiation efficiency of the chip antenna, difficulty in end-fire, large horn antenna size, and difficulty in forming an array.

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