Resolution detecting and calibrating method for ultrasonic microscope

Abstract

The invention belongs to the technical field of ultrasonic non-destructive detection, and relates to a resolution detecting and calibrating method for an ultrasonic microscope, which can be used for verifying transverse defect detection capability and longitudinal defect detection capability of an ultrasonic detection system, and enable the detection to be more accurate through calibrating a detection result of the ultrasonic microscope. The method comprises the following steps: etching a series of micron-size holes in the upper surface of an optical sheet glass through the laser micro-nano technology, wherein the dimension of the least micron-size hole that can be identified by ultrasonic micro imaging is the transverse detecting resolution; realizing transverse calibration by calculating a pixel compensation value through ultrasonic microscopic measurement for the longitudinal section of a standard gauge block; designing a glass wedge block sample and measuring the thickness with an acoustic time method, wherein the thickness of the thinnest water layer measured is the longitudinal detecting resolution; realizing longitudinal calibration by obtaining a linear fitting equation through analyzing a measured value and a theoretical calculating value. The method is simple to operate, is easy to realize, solves the problem of objective evaluation on ultrasonic defect detection capability, and enables the detection result of the ultrasonic microscope to be more reliable.

Description

1. Technical field [0001] The invention belongs to the field of ultrasonic detection, and relates to a resolution test and calibration method of an ultrasonic microscope, which is suitable for ultrasonic microscopic and ultrasonic C-scan detection. 2. Background technology [0002] Ultrasonic microscope is a new type of non-destructive testing instrument. It uses high-frequency focused ultrasonic waves to perform non-destructive testing on objects. It can detect the internal and sub-surface structures of objects with high precision and high sensitivity. It can observe the depth from the surface to tens of millimeters. Ultrasonic microscopic detection has the characteristics of high sensitivity, high resolution and intuitive images for the micron to hundreds of micron scale structures in the internal body. It has been widely used in the fields of electronics industry, medicine, material science and so on. [0003] The selection of high-frequency focused ultrasonic transducer ...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a test and calibration method for the detection resolution of an ultrasonic microscope, which is used to verify the horizontal and vertical defect detection capabilities of the ultrasonic microscope, and at the same time calibrate the detection results of the ultrasonic microscope through the corresponding calibration method to solve the ultrasonic detection process. The problem of objective evaluation of defect detection capabilities in medium and medium-sized defects makes the detection results of ultrasonic microscopes more accurate

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