Punch-through IGBT and manufacturing method thereof
A production method and a punch-through technology, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve difficult problems and achieve the effects of reducing process difficulty, increasing thickness, and reducing the risk of splinters
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[0038] As mentioned in the background art section, in the prior art, there is a problem of high manufacturing difficulty when manufacturing punch-through IGBTs.
[0039] The inventors have found that there are two methods for fabricating the punch-through IGBT in the prior art: one is to fabricate the punch-through IGBT through an epitaxial process; the other is to fabricate the punch-through IGBT through a diffusion or ion implantation process.
[0040] For the method of making punch-through IGBT by epitaxial process, it specifically includes: providing a P-type silicon substrate, epitaxially growing an N-type buffer layer on the surface of the P-type silicon substrate; and then epitaxially growing an N-type buffer layer on the surface of the N-type buffer layer Drift region; then make a front structure on the surface of the N-type drift region; finally thin the back of the P-type silicon substrate to form a collector region. The drift region and buffer layer in this method a...
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