Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Vibration element and electronic device

A vibrator and electrode technology, applied in the field of vibrator and electronic equipment, can solve the problem of upper electrode sticking to the lower electrode, etc.

Inactive Publication Date: 2014-06-11
SEIKO EPSON CORP
View PDF7 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, in the prior art, the problem of the upper electrode sticking to the lower electrode in the manufacturing process will be significantly manifested when dealing with the above-mentioned needs

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Vibration element and electronic device
  • Vibration element and electronic device
  • Vibration element and electronic device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0050] First, the MEMS vibrator 100 as the vibrator of Embodiment 1 will be described.

[0051] figure 1 (a) is a top view of the MEMS vibrator 100, figure 1 (b) is figure 1 (a) A-A sectional view, figure 1 (c) is figure 1 (a) BB sectional view.

[0052] The MEMS vibrator 100 is a MEMS vibrator provided with a movable upper electrode (vibrator) formed away from the substrate by etching a sacrificial layer laminated on the main surface of the substrate.

[0053] In addition, the term "sacrifice layer" refers to a layer temporarily formed of an oxide film or the like, and is removed by etching after desired layers are formed above, below, and around the sacrificial layer. By removing the sacrificial layer, desired gaps or cavities are formed between upper, lower and surrounding layers, and desired structures are formed separately.

[0054] The MEMS vibrator 100 includes a substrate 1 , a first lower electrode 11 , a second lower electrode 12 , an upper electrode 20 as a vi...

Embodiment approach 2

[0094] Next, the MEMS vibrator 101 as the vibrator of Embodiment 2 will be described. In addition, in the description, the same reference numerals are used for the same structural parts as those of the above-mentioned embodiment, and repeated descriptions are omitted.

[0095] image 3 is a plan view of the MEMS vibrator 101 .

[0096] The MEMS vibrator 101 is configured to include a substrate 1, a first lower electrode 11, a second lower electrode 12e, an upper electrode 20 as a vibrating body, a support portion composed of a connecting beam 21 and a supporting beam 22, a fixed portion 23, and a fixed base portion 12i. Wait.

[0097] Such as figure 1 As shown in (a), in the first embodiment (MEMS vibrator 100 ), the structure in which the upper electrode 20 is electrically connected to the second lower electrode 12 via the connection beam 21 , the support beam 22 and the fixing portion 23 has been described, but in this embodiment Among them, the part constituting the sec...

Deformed example 1

[0115] Figure 6 (a) to (c) are plan views showing modifications of the lower electrode as the MEMS vibrator of the first modification.

[0116] In Embodiment 1, such as figure 1 As shown in (a), the structure in which the lower electrode includes both the first lower electrode 11 and the second lower electrode 12 has been described, but the structure is not limited to this, and the lower electrode may have a structure of only one lower electrode.

[0117] Figure 6 The modified example shown in (a) is an example in which only the first lower electrode 11 constitutes the lower electrode.

[0118] Figure 6 The modified example shown in (b) is an example in which only the second lower electrode 12 constitutes the lower electrode.

[0119] Figure 6 The modified example shown in (c) is an example in which the lower electrode is constituted only by the second lower electrode 12e.

[0120] In such a configuration, although the vibration energy is different, it is possible to...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention provides a vibration element and an electronic device. The vibration element is capable of achieving further minimization and reducing vibration leakage, and can be produced in a stable manner without causing electrode adhesion in the manufacturing process. A MEMS vibration element 100 includes a substrate 1, fixing parts 23 provided on a principal surface of the substrate 1, supporting parts (supporting beams 22 and connection beams 21) extending from the fixing parts 23, and an upper electrode (a vibration body) supported by the supporting parts, isolated from the substrate 1. The upper electrode 20 includes cut sections 30 each extending from the peripheral portion of the upper electrode 20 toward the central portion of the upper electrode 20, the cut sections 30 exposing side surfaces 31 of the upper electrode 20. The upper electrode 20 includes joining parts provided at the side surfaces 31 oriented in a direction from the peripheral portion toward the central portion of the upper electrode 20, and the joining parts are connected to the supporting parts 22.

Description

technical field [0001] The present invention relates to a vibrator and electronic equipment. Background technique [0002] Electromechanical structures (such as vibrators, filters, sensors, motors, etc.) that have mechanically movable structures called MEMS (Micro Electro Mechanical System: Micro Electro Mechanical Systems) devices formed by microfabrication technology are generally known. Among them, compared with vibrators / resonators using quartz or dielectrics that have been mainly used so far, MEMS vibrators are easy to mount and manufacture with semiconductor circuits, which is beneficial to miniaturization and high functionality, so they are actively used. . [0003] As typical examples of conventional MEMS vibrators, there are known a comb-type vibrator vibrating in a direction parallel to a substrate surface and a beam-type vibrator vibrating in a thickness direction of a substrate. A beam-type vibrator is a vibrator composed of a lower electrode (fixed electrode)...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02
CPCB81B3/0097B81B3/007B81B2201/0242B81B2201/0271G01C19/5712H03H9/2405H03H9/2431H03H9/2436H03H2009/02354
Inventor 木原龙儿矢岛有继
Owner SEIKO EPSON CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com