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600kw gas discharge electronic gun and application method thereof

A technology of gas discharge and electron gun, which is applied in the direction of discharge tubes, circuits, electrical components, etc., can solve the problems of complex structure, high skill and experience requirements, and high manufacturing and use costs of hot cathode electron guns, so as to improve the use value and scope of use, The effect of wide application range and low cost

Active Publication Date: 2014-06-25
GRIMAT ENG INST CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the structure of the hot cathode electron gun is complex, the manufacturing precision is high, the preparation auxiliary equipment is more, the operator's skills and experience are high, and the corresponding manufacturing and use costs are relatively high.

Method used

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  • 600kw gas discharge electronic gun and application method thereof

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Embodiment Construction

[0030] Such as figure 1 As shown, the present invention is a 600kw gas discharge electron gun led by the principle of glow discharge, which includes: the uppermost end is a gun cover 1, and the inner disk of the gun cover 1 has multiple circles of water pipes 2 (closed cooling water unit device as a cathode block) , to increase the resistance of the water pipe, a large cylinder 7 is installed under the gun cover, and an open-loop control inflation system 8 is installed on the large cylinder, which is mainly used to adjust the power of the electron gun and adjust the temperature of the gun chamber. There is a high-voltage insulating porcelain bottle 3 on the large cylinder, and the cold cathode cylinder 5, which is a key part for glow discharge, is installed in the large cylinder. The cold cathode cylinder 5 is equipped with a sealing fixture 4 for sealing cooling water and fixing the cold cathode. Two water pipes, one in and one out, are installed on the part 4, and the two wa...

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Abstract

The invention provides a 600kw gas discharge electronic gun comprising an upper gun cover, a middle gun body and a bottom gun base. An electronic gun core and an anode are arranged in the gun body. A focusing coil and a deflection scanning coil are arranged under the anode, and a focusing magnetic lens is provided. The electronic gun core, the anode, the focusing coil and the deflection scanning coil are all provided with a cooling water path. An electronic gun core which is composed of cathode blocks is arranged in a cold cathode cylinder. The electronic gun core is externally connected with a control system through a cable. A closed air chamber is formed around the electronic gun core and the anode. An open-loop control type inflation system is provided. The inflation system can be used to inflate hydrogen and oxygen into the closed air chamber. According to the invention, the manufacturing and using cost can be greatly reduced, and advantages of easy operation, low working strength and high working efficiency can be realized.

Description

technical field [0001] The invention relates to an electron gun for an electron beam melting furnace, in particular to a gas discharge electron gun with a maximum power of 600kw guided by the principle of glow discharge and a use method thereof. Background technique [0002] The electron gun is a device that accelerates electrons to bombard the target. It emits an electron beam with a certain energy, a certain beam current, a speed and an angle. The electron beam forms a preset pattern after focusing, deflecting and scanning the electron optical system. . High-power electron guns are mostly used in smelting equipment, mainly used in the purification of refractory metals such as W, Mo, Ta, Nb, and polysilicon in the photovoltaic industry to remove phosphorus. [0003] The traditional electron guns for electron beam smelting all use hot cathode electron guns, and their structure is generally as follows: 1. First, it needs to have a cathode, an anode and a filament, for which ...

Claims

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Application Information

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IPC IPC(8): H01J37/077H01J37/065H01J37/147H01J37/141
Inventor 孙照富尹中荣
Owner GRIMAT ENG INST CO LTD
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