Folded slot antenna structure and manufacturing method thereof

A manufacturing method and a technology for folding grooves, which are applied in the structural form of radiating elements, antenna supports/installation devices, etc., can solve problems such as thin substrates, and achieve the effects of reducing transmission distance, volume and loss.

Active Publication Date: 2015-10-28
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a folded slot antenna structure and manufacturing method, which is used to solve the problem of thinner dielectric substrates of silicon-based integrated antennas in the prior art

Method used

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  • Folded slot antenna structure and manufacturing method thereof
  • Folded slot antenna structure and manufacturing method thereof
  • Folded slot antenna structure and manufacturing method thereof

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Embodiment Construction

[0040] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0041] see Figures 1a-1k shown. It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbitr...

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Abstract

The invention provides a folding-slot antenna structure and a manufacturing method thereof. The method is characterized by coating a fluid and low dielectric constant organic dielectric material on a silicon substrate and curing the organic dielectric material to serve as a dielectric substrate of the antenna; producing a folding-slot antenna graph on the dielectric substrate; and etching the silicon substrate at corresponding areas under the folding-slot antenna graph so as to form a medium cavity. The etching method of the medium cavity is characterized by, before producing the antenna graph, performing etching by utilizing low-cost wet process KOH; and after the antenna is produced, etching the rest silicon film by utilizing a DRIE dry method. The folding-slot antenna in the invention helps to overcome the disadvantage of relatively-thin dielectric substrate of a silicon-based integrated antenna; the bandwidth of the antenna is substantially increased and the performance of the antenna is improved; and the bandwidth of the antenna is allowed to increase to above 15%. The manufacturing process is compatible with embedded chip packaging; and the produced antenna can be packaged with the chip, thereby reducing the transmission distance of a signal line and reducing loss. Meanwhile, since the antenna and the chip are integrated together, the reliability of the antenna is improved, the size of the antenna is reduced, and the antenna accords with the trend of modern integrated circuit packaging.

Description

technical field [0001] The invention relates to an antenna and a manufacturing process thereof, in particular to a low-resistance silicon-based folded slot antenna structure and a manufacturing method. Background technique [0002] In the field of wireless communication, antenna is an indispensable and very important part. The microstrip antenna is a new type of antenna successfully developed in the early 1970s. Compared with commonly used microwave antennas, it has the following advantages: small size, light weight, low profile, conformal to the carrier, simple manufacture, and low cost; the characteristic of electrical appliances is that it can obtain a single-directional wide-lobe pattern, The maximum radiation direction is in the normal direction of the plane, easy to integrate with microstrip lines, and easy to realize linear polarization or circular polarization. Microstrip antennas with the same structure can form a microstrip antenna array to obtain higher gain and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01Q1/38H01Q1/22
Inventor 王天喜罗乐徐高卫
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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