Copper-indium-gallium-selenium co-evaporation linear source apparatus and use method thereof
A copper indium gallium selenide, linear source technology, applied in vacuum evaporation plating, climate sustainability, ion implantation plating, etc., can solve problems such as uneven coating, achieve improved process effects, easy to implement, and simple structure Effect
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[0023] A copper indium gallium selenide co-evaporation linear source device, such as figure 1 and figure 2 As shown, it includes four groups of parallel segmented linear sources with adjustable curvature, which are evenly distributed in the evaporation zone 1 below the glass substrate.
[0024] The sectioned linear source includes five single-section linear sources 3 , and the single-section linear sources 3 are rotatably connected by joint bolts 5 and rotary joints 7 .
[0025] The two ends of the segmented linear source are provided with lateral tension regulators 6, which are rotatably connected to the two ends of the segmented linear source through joint bolts 5 and rotary joints 7. The revolving joint 7 is a semicircular revolving joint with the joint bolt 5 as a pivot.
[0026] The joint bolt 5 is also provided with a longitudinal tension regulator 8 .
[0027] Horizontal stretch regulator 6 is used to adjust the position of single-section linear source 3 in the hori...
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