The invention provides a
hard mask plate, a preparation method and an application method thereof, and a
coating jig. The
hard mask plate comprises a
coating through hole; a step structure is arranged on the side wall of the
coating through hole, the step structure comprises more than one coating step, and the distance between the
tread of the coating step and the second surface is smaller than the distance between the first surface and the second surface. According to the
hard mask, the
film coating steps are arranged on the side walls of the
film coating through holes of the hard
mask, so that the problem of non-uniform
film coating caused by shielding of the edges of the film coating through holes is avoided, and the
mechanical strength of the hard
mask is ensured; meanwhile, a clamping
microstructure corresponding to the MEMS
wafer is arranged on the hard
mask plate, so that precise positioning is realized, and the coating position precision is improved; in addition, the height of the connecting area among the plurality of coating through holes in the
chip area is set, so that uneven coating caused by shielding of the connecting area among the coating through holes with small intervals is avoided, and the
mechanical strength of the connecting area is ensured; and finally, a coating jig is arranged to fasten and position the aligned hard mask plate and MEMS
wafer, so that the coating position precision is improved.