Monolithic integrated full-decoupling triaxial silicon microgyroscope

A monolithic integrated, silicon micro-gyroscope technology, used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve the problems of incomplete decoupling, complex structure and processing technology, and difficult to achieve performance. , to achieve the effect of good measurement performance, reduction of mass processing and production, and reduction of detection errors

Inactive Publication Date: 2014-07-02
SOUTHEAST UNIV
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Problems solved by technology

STMicroelectronics has designed a monolithic integrated three-axis gyroscope product with a structural size of only 3.2×3.2 mm, but it does not achieve complete decoupling of each drive and detection direction, so it is difficult to achieve high performance
Cai Nanquan from Cheng Kung Un

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  • Monolithic integrated full-decoupling triaxial silicon microgyroscope
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  • Monolithic integrated full-decoupling triaxial silicon microgyroscope

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Embodiment Construction

[0034] The present invention will be further specifically described below in conjunction with the embodiments and the accompanying drawings.

[0035] figure 1 The monolithically integrated fully decoupled three-axis silicon micro gyroscope includes a substrate and a driving part located on the substrate, a driving detection part, a heading angle detection part, a pitch angle detection part, a roll angle detection part, a square large Frame and coupling folded beams; there are four large square frames, which are set opposite to each other and form a square symmetrical structure. The four large square frames are connected as a whole by coupling folded beams, and the coupled folded beams are fixed on the substrate; the driving part has four pieces , respectively connected to the inner edges of the four large square frames, the inner edges refer to the inner sides of the large square frames that are arranged oppositely in pairs; the drive detection part has two pieces that are res...

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Abstract

The invention discloses a monolithic integrated full-decoupling triaxial silicon microgyroscope which adopts a square symmetric structure and mainly comprises a driving part, a driving detection part, a course angle detection part, a pitching angle detection part, an angle detection part, and corresponding coupling folding beams, wherein structures in four large square frameworks in the designed square symmetric structure are consistent, and the structural forms on two opposite edges are completely the same; the four large frameworks are connected through the coupling folding beams at four opposite angles. The monolithic integrated triaxial silicon microgyroscope disclosed by the invention can be used for simultaneously measuring angular speeds in the course direction, the pitching direction and the transverse rolling direction; furthermore, complete decoupling is realized among all modals through a reasonable structural design, so that high measurement performance is achieved.

Description

technical field [0001] The invention relates to the field of micro-electromechanical gyroscopes, in particular to a single-chip integrated fully decoupled three-axis silicon micro-gyroscope. Background technique [0002] Compared with traditional gyroscopes, silicon micromechanical gyroscopes have the advantages of small size, light weight, low cost, high reliability, low power consumption, and mass production, and can be widely used in aviation, automobiles, medical care, photography, and consumer electronics and other fields, has broad application prospects. At present, the most widely used research and application is the single-axis gyroscope, which can only sensitively detect the angular velocity input in one direction, while the three-axis gyroscope can be sensitive to the angular velocity input in three directions at the same time. [0003] In terms of the development of three-axis gyroscopes, STMicroelectronics, AD, etc. have already released commercial-grade product...

Claims

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Application Information

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IPC IPC(8): G01C19/5719
CPCG01C19/5733
Inventor 夏敦柱孔伦虞成胡异炜倪佩圳
Owner SOUTHEAST UNIV
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