A thin film sensor for transient temperature measurement and its manufacturing method
A thin-film sensor and transient temperature technology, applied in thermometers, measuring devices, measuring heat, etc., can solve the problems of conductive silver glue that is easy to fall off and not firm, and achieve the effects of short response time, convenient portability and high strength
Active Publication Date: 2016-11-23
DALIAN JIAOTONG UNIVERSITY
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Problems solved by technology
In scientific experiments, high temperature resistant conductive silver glue is usually used to bond thermocouple electrodes and wires. However, because the conductive silver glue is very fragile and easy to fall off in a solid state, and it is not firm, there is an urgent need for a solution to the problem of lead connection. method
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[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028] Such as figure 1 As shown, the thin film sensor mainly includes thermal electrodes (1, 2), a stainless steel sleeve 4 set outside the thermal electrodes, and an insulating layer 3 arranged between the thermal electrodes and the stainless steel sleeve 4.
[0029] The thermal electrodes include thermal electrode one made of nickel-silicon material and thermal electrode two made of nickel-chromium material, wherein the thermal electrode one includes a wire part 1 and a film structure part 5 plated on the end face of the insulating layer, and the thermal electrode two 2 It is a wire-like structure, and the film structure part 5 of the thermal electrode 1 is in contact with the thermal electrode 2 to form a thermal junction—that is, the needle-shaped temperature...
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The invention discloses a film sensor for transient temperature measurement and a manufacturing method thereof. The sensor includes a thermal electrode, a stainless steel sleeve and an insulating layer. The thermal electrode includes a thermal electrode 1 and a thermal electrode 2. The thermal electrode 1 includes a wire part and the film structure part plated on any end surface of the insulating layer, the thermal electrode 2 is a wire structure, and the film structure part of the thermal electrode 1 is in contact with the thermal electrode 2 to form a thermal junction—that is, the temperature measuring end; the wire of the thermal electrode 1 The lengths of part and thermal electrode two are longer than the length of the stainless steel sleeve, and protrude from the stainless steel sleeve. The part of the above thermal electrode protruding from the stainless steel sleeve is directly used as the corresponding compensation wire for each thermal electrode. The invention has the advantages of convenient portability, short response time, and high measurement accuracy; the insulating layer prepared by high-temperature sintered nano-ceramic powder has the advantages of good bonding and high strength; and the integrated design of the hot electrode wire and the compensation wire avoids glue After the bonded compensation wire is air-dried, it is hard, brittle and easy to fall off.
Description
technical field [0001] The invention belongs to the technical field of temperature measurement technology and sensor preparation, and in particular relates to a thin-film thermocouple structure for transient temperature measurement and a manufacturing method thereof. Background technique [0002] With the continuous development of science and technology, in metallurgical building materials, thermal equipment, power machinery, rocket engines, chemical containers, nuclear energy engineering and other disciplines, the measurement of transient temperature plays a very important role, especially the transient temperature surface temperature. Thin-film thermocouples have the advantages of small heat capacity, small size, fast response speed, small damage to the parts to be tested, and little interference to the test environment, so they have been used in thermal radiation measurement and surface temperature measurement. For thin-film thermocouples, if they are prepared by sputter...
Claims
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IPC IPC(8): G01K7/02C23C14/35C23C14/06C04B35/622
Inventor 崔云先赵家慧郭立明安阳祁洋宫刻张启祥
Owner DALIAN JIAOTONG UNIVERSITY