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Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof

An imaging spectrometer and micro-mirror technology, which is applied in the field of remote sensing observation of the earth, can solve the problems of limiting the luminous flux of the system, achieve the effect of solving the low signal-to-noise ratio of the system, increasing the luminous flux, and improving the reliability

Active Publication Date: 2014-08-27
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

However, the traditional spatially modulated Fourier transform imaging spectrometer contains slits related to the spatial resolution, which limits the light flux entering the system

Method used

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  • Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof
  • Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof
  • Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof

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specific Embodiment approach 1

[0036] Specific implementation mode 1. Combination figure 1 and figure 2 Describe this embodiment, the imaging spectrometer based on the multistage micro-mirror, the imaging spectrometer is composed of a pre-imaging system 1, an interference system 2, a post-imaging shrinking system 3 and an infrared CCD4. Among them, the interference system 2 is composed of a multi-level stepped micro-mirror 7, a plane mirror 5, a sheet beam splitter 6 and a compensation plate 8; at a certain moment, the light emitted by the ground target object enters the imaging spectrometer system at a certain field of view , after passing through the pre-imaging system 1 and the sheet beam splitter 6, the images are respectively imaged on a stepped surface of the plane mirror 5 and the multi-step micro-mirror 7 . Wherein the different reflective surfaces of the multi-level stepped micro-mirror 7 correspond to images formed in a certain field of view range of ground objects, and are imaged on a certain r...

specific Embodiment approach 2

[0045] Specific embodiment two, combine Figure 3 to Figure 5 Describe this embodiment, this embodiment is the manufacturing method of the imaging spectrometer based on the multistage micro-mirror described in specific embodiment 1, this method is realized by the following steps:

[0046] a. Make the base of the imaging spectrometer, choose aluminum, copper, titanium, stainless steel or silicon as the base material, make the base material according to the designed size requirements, and polish the upper surface; the roughness of the polished surface is less than Equal to 10 microns, flatness less than or equal to 50 microns.

[0047] b. Taking the center position of the substrate as the center position of the transflective and transflective surface of the sheet beam splitter 6, the relative positions of the four optical axis reference lines using the refractive index and thickness data of the sheet beam splitter 6 and the compensation plate 6 And the position of the micro-adj...

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Abstract

The invention discloses an imaging spectrometer based on a multi-level micro reflecting mirror and a manufacturing method of the imaging spectrometer, and relates to the field of to-earth remote sensing and detecting. The problem that because an existing imaging spectrometer internally includes a slit related to spatial resolution, luminous flux entering a system is limited is solved. The imaging spectrometer comprises a preposed imaging system, an interference system, a postposed imaging system and a focal plane detector. The interference system comprises a multi-level stepped micro reflecting mirror flaky beam splitter, a compensation plate and a planar reflecting mirror. After light emitted by an objective passes through the preposed imaging system and the flaky beam splitter, one beam of light is reflected by the flaky beam splitter to the planar reflecting mirror and is imaged into a first image point, the other beam of light is transmitted by the flaky beam splitter, passes through the compensation plate and is imaged into a second image point on a certain stepped reflecting face of the multi-level stepped micro reflecting mirror; the light of the first image point is transmitted through the flaky beam splitter to the postposed imaging system for imaging, the light of the second image point passes through the compensation plate to the flaky beam splitter for reflecting and then is imaged on a postposed imaging beam shrinking system, and images of the postposed imaging beam shrinking system are received by the focal plane detector.

Description

technical field [0001] The invention belongs to the field of remote sensing observation of the earth, and relates to a manufacturing method of a Fourier transform infrared imaging spectrometer, in particular to a manufacturing method of a novel space-time combined modulation infrared Fourier transform imaging spectrometer system based on multi-level ladder micro-reflectors. Background technique [0002] The imaging spectrometer is a new generation of optical remote sensing instrument developed on the basis of the multispectral imager in the 1980s. It can expand the traditional two-dimensional spatial information to the three-dimensional spatial spectral information, so as to realize the fine-grained detection of ground objects. identification and classification. Therefore, the imaging spectrometer is an important tool for ground remote sensing detection. It combines the advantages of spectrometers and multispectral imagers, and truly realizes the detection of objects with "m...

Claims

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Application Information

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IPC IPC(8): G01J3/45G01J3/02G02B27/10
Inventor 梁中翥梁静秋王维彪吕金光秦余欣田超王文丛
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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