A four-cilia biomimetic mems vector underwater acoustic sensor microstructure

Abstract

The invention discloses a four-cilia bionic MEMS vector underwater acoustic sensor microstructure, which includes a square frame and a "well"-shaped cantilever arm erected in the center of the square frame. Each section of the "well"-shaped cantilever arm consists of a wide section and a symmetrical It is composed of narrow sections arranged on both sides of the wide section, and piezoresistors with equal resistance are respectively arranged on the narrow sections, and the piezoresistors form two sets of Wheatstone full bridges in total, and the two sets of Wheatstone full bridges The Tongquan bridge measures the aquatic signals in two mutually perpendicular directions, and each square connector is fixed with vertical cilia. The present invention utilizes MEMS technology to integrate four bionic cilia on one chip, and adopts a "well"-shaped cantilever arm structure to increase local stress concentration through the form of narrow-width-narrow beams in each section, thereby increasing the resistance of the piezoresistor. The value changes, thereby improving the sensitivity of the structure, and solving the contradiction between the sensitivity and the frequency response range of the existing MEMS bionic hydrophone.

Description

technical field [0001] The invention belongs to the field of vector hydrophones, in particular to a four-cilia bionic MEMS two-dimensional vector hydrophone microstructure with multi-segment beams. Background technique [0002] In view of the micro-electro-mechanical system (MEMS, Micro Electro Mechanical System) technology has the characteristics of miniaturization, diversification, micro-electronics and the advantages of easy realization of the miniaturization and consistency of underwater acoustic sensors, MEMS vector hydrophones have become the current domestic It is one of the hotspots in the field of external sound transducer research. The public document with the patent application number 200610012991.0 proposes a resonant tunneling bionic vector underwater acoustic sensor, which uses a single sensor to detect the orientation of the underwater acoustic signal in a two-dimensional plane, although it breaks through the sensitivity and Limit state of resolution. Howeve...

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Problems solved by technology

However, there has always been a contradiction between the sensitivity and the frequency response range of the hydrophone, that is, if the frequency response range is to be wider, the sensitivity of the hydrophone must be reduced, thereby reducing the resolution of the vector hydrophone; if the sensitivity is to be increased, It is necessary to reduce the frequency range of the hydrophone

However, in practical engineering applications, the hydrophone needs to have a certain frequency response range, so the contradiction between the sensitivity and the frequency response range directly affects the further engineering application of the MEMS hydrophone

Another example is that the public document with the patent application number 201210557743.X proposes a microstructure of a quaternary array MEMS vector hydrophone, which can effectively eliminate the blurring problem of starboard and starboard sides, but there is still a gap between the above-mentioned sensitivity and frequency response range. contradictory shortcomings

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