Light emitting diode and manufacturing method thereof
A technology for light-emitting diodes and a manufacturing method, which is applied to electrical components, circuits, semiconductor devices, etc., can solve problems such as low light extraction efficiency, and achieve the effects of reducing total reflection and improving light extraction efficiency.
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[0014] Please refer to Figure 1 to Figure 9 As shown, a method for manufacturing a light emitting diode 100 provided by an embodiment of the present invention includes the following steps:
[0015] In the first step, a substrate 10 is provided, and a mask 20 is formed on the substrate 10 so that the mask 20 covers the substrate 10 (please refer to figure 1 ).
[0016] In this embodiment, the material of the substrate 10 is sapphire, and the material of the mask 20 is polysilicon. The mask 20 is grown on the upper surface of the substrate 10 by chemical vapor deposition (CVD), and the thickness of the mask 20 is 2 micrometers.
[0017] In the second step, the mask 20 is patterned and etched. After the mask 20 is etched, a plurality of nanoscale holes 22 are formed through the mask 20 to partially expose the substrate 10 below the mask 20 (please refer to figure 2 ).
[0018] In this embodiment, this step uses a mixed liquid of hydrofluoric acid and nitric acid to etch the...
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