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Track guiding electrode

A track-guided and electrode technology, applied in the field of track-guided electrodes, can solve the problems of decreased electrical conductivity of electrodes, short service life of equipment, high maintenance costs, etc., and achieve the effects of improving stability, improving reliability and long service life

Inactive Publication Date: 2014-10-15
上海宝镀真空设备科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002]In the application of vacuum aluminum film machine, the clamping of the crucible (boron nitride) in the middle of the evaporation box of the aluminum plating machine has always been a big problem, because in the process of aluminum plating , the crucible must remain in a fixed position, and it needs to be disassembled and cleaned after the aluminum plating is completed. The domestic aluminum plating machine usually assembles a spring on the positive copper shaft, and the spring is installed here. However, considering that the linear movement of the spring is not very precise, the occasional failure is that the spring not only moves axially, but also slightly moves radially, which leads to a decrease in the conductivity of the electrode
Moreover, there is no guide structure in China at present, and the service life of the equipment is short. When a problem occurs, it will cost a lot of maintenance, resulting in a waste of resources and an increase in cost.

Method used

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  • Track guiding electrode

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Embodiment Construction

[0010] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0011] Such as figure 1 As shown, a rail-guided electrode according to an embodiment of the present invention includes a positive electrode copper shaft 1, a solid plate 2, a positive electrode wall plate 3, a positive electrode copper shaft fixing plate 4, an insulating bakelite sleeve 5, a linear guide rail 6, and an electrode guide plate 7 , an elastic device 8, a positive heat shield 9, a crucible 10 and a negative copper shaft 11, the lower end of the positive copper shaft 1 is provided with a solid plate 2 and a positive copper shaft fixing plate 4, and the solid plate 2 and the positive copper shaft fixing plate 4 connection, the positive electrode wallboard 3 is fixed on the lower end of the positive electrode copper shaft 1, the insulating bakelite sleeve 5 is arranged on the lower end of the positive electrode copper sh...

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Abstract

The invention discloses a track guiding electrode. The track guiding electrode adopts the structure that a solid plate and an anode copper shaft fixing plate are arranged at the lower end of an anode copper shaft; the fixing plate is connected to the anode copper shaft fixing plate; a positive electrode wall plate is fixed at the lower end of the anode cooper shaft; an insulating bakelite sleeve is arranged at the lower end of the anode copper shaft fixing plate; a linear guide rail is mounted at the upper end of an electrode guide plate; an elastic device is connected to one end of the electrode guide plate; an anode heat shield sheet is fixed at one end of the anode copper shaft; one end of a crucible is connected to a cathode copper shaft. According to the invention, the linear guide rail is directly connected with the evaporation electrode (namely the electrode) to ensure the motion trail of the electrode during moving; as the insulating bakelite sleeve is arranged, the contact of an evaporation box with a positive electrode is avoided; with a fastening device, linear reciprocating movement of the electrode is totally ensured, and the stability of the electrode is improved, so that the movement reliability is improved to a great extent, and the service life of the track guiding electrode is long.

Description

technical field [0001] The invention relates to the field of evaporation of aluminum plating machines, in particular to a track-guiding electrode. Background technique [0002] In the application of vacuum aluminum film machine, the clamping of the crucible (boron nitride) in the middle of the evaporation box of the aluminum plating machine has always been a big problem, because during the aluminum plating process, the crucible must remain in a fixed position, and after the aluminum plating is completed It needs to be disassembled and cleaned. The domestic aluminum plating machine usually assembles a spring on the positive copper shaft, and the spring is installed here. From the effect point of view, the effect has been achieved, but considering that the linear motion of the spring is not very accurate, it will happen occasionally. The fault is that the spring not only moves axially, but also slightly moves radially, which leads to a decrease in the conductivity of the elect...

Claims

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Application Information

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IPC IPC(8): C23C14/14C23C14/26
Inventor 陈生贩江裕捺陈生镇田晓东
Owner 上海宝镀真空设备科技有限公司