Fringe effect based capacitance type micro inertial sensor with self-calibrating

Abstract

The invention relates to a fringe effect based capacitance type micro inertial sensor with self-calibrating. The existing sensor having the self-calibrating function is small in calibrating range. Sensor blocks are rectangular silicon wafers etched with grid-shaped wells; four corresponding ends are connected with anchor points through silicon supporting beams; the four corresponding ends are correspondingly provided with rectangular silicon strips in the same number; comb type silicon strips which are connected with the sensor mass blocks, fixed detection silicon strips, grid-shaped electrodes and grid-shaped aluminum electrodes on the surface of a substrate are formed into detection capacitance. When acceleration speed signals are loaded in the mass block sensitive directions, silicon strip groups on the sensor mass blocks cut electric field lines of substrate fringe electric fields and then the substrate fringe capacitance is changed; the size of the loaded acceleration speed is detected due to detection of the capacitance change of the micro inertial sensor. The existing sensor having the self-calibrating function has the advantages of increasing vibrator quality, reducing pull-in and brown noise, increasing detection capacitance and reducing pressed film air damping.

Description

technical field [0001] The invention belongs to the technical field of micro-electronic machinery, relates to a micro-inertial sensor, in particular to a high-precision micro-inertial sensor with self-calibration function based on edge effect. Background technique [0002] Acceleration sensors have been used as one of the most important inertial instruments since they came out. They are used in inertial navigation and inertial guidance systems, and are attached to the automatic driving of sea, land, air and space vehicles and the high-precision guidance of high-tech weapons. With its advantages of small weight, low cost, low power consumption, small size, strong overload capacity, easy integration and mass production, the micro-machined acceleration sensor has not only become the core component of the miniature inertial measurement unit (MIMU) in some high-tech weapons, There are also broad markets in commercial and civilian fields, such as vehicle control, general aviation,...

AI Technical Summary

Problems solved by technology

But this shaker is not only expensive, but also inefficient for calibration

Due to the mass production of micro-mechanical sensors, the method of calibrating the vibration table one by one has more obvious disadvantages, which cannot meet the requirements of batch calibration

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