The invention relates to a capacitive micro inertial sensor with a self
calibration function. An existing sensor with the self
calibration function is small in calibration range. According to the capacitive micro inertial sensor with the self
calibration function, one sensor
mass block is a rectangular
silicon slice etched with grid-shaped wells, two corresponding ends of the sensor
mass block are connected with anchor points through
silicon supporting beams, and rectangular
silicon strips are respectively arranged the other two corresponding ends of the sensor
mass block. Two driver mass blocks are arranged at two sides of the sensor mass block, an annular groove is formed in the middle of each driver mass block in an engraved mode, movable mass block driving silicon strips and driver driving silicon strips are arranged at two sides of each driver mass block, and the silicon strips connected with the sensor mass block form a mass block driving
capacitor along with the corresponding mass block driving silicon strips. Comb tooth strips fixing the driving silicon strips and the movable driver driving silicon strips form a driver driving
capacitor. Comb-shaped silicon strips and fixed detection silicon strips connected with the sensor mass block, a grid
electrode and an interdigital
aluminum electrode on the surface of a substrate form a detecting
capacitor. The capacitive micro inertial sensor with the self calibration function increases the mass block driving
capacitance, further reduces driving
voltage, increases the mass of an oscillator, and reduces Brown
noise.