Robot system (100, 800) comprising the following: a
robot (110, 810) that includes a movable arm configuration (MAC, MAC') the movable arm configuration (MAC, MAC') includes an end tool
assembly configuration (ETMC, ETMC') located near a remote end (DE2, DE5) of the movable arm configuration (MAC, MAC'), and wherein the
robot (110, 810) is configured to move the movable arm configuration (MAC, MAC') to move at least one section of an end tool (ETL) mounted on the end tool
assembly configuration (ETMC, ETMC') along at least two dimensions in an end tool working volume (ETWV, ETWV'); and a
motion control system (140, 840) configured to control an end tool position (ETP, ETP') with an accuracy level defined as
robot accuracy, based at least partially on sensing and controlling the position of the movable arm configuration (MAC, MAC') using at least one
position sensor (SEN1-SEN2, SEN1'-SEN5') incorporated in the robot (110, 810); and wherein the robot
system (100, 800) further includes a determination system for additional measurement position coordinates (150, 850) which comprises the following a first
image acquisition configuration (160, 860-1) comprising a first camera (
CAM1,
CAM1'), wherein the first
image acquisition configuration (160, 860-1) has an
optical axis (OA1, OA1'); an XY scale (170, 870) comprising a nominally
planar substrate (SUB) and several corresponding mapping features (IIF, AIF) distributed on the substrate (SUB), wherein the corresponding mapping features (IIF, AIF) are located at corresponding known XY scale coordinates on the XY scale (170, 870); an image trigger section (181, 881) configured to input at least one input
signal belonging to the end tool position (ETP, ETP') and to determine the time of a first
image acquisition trigger
signal based on the at least one input
signal and to output the first image acquisition trigger signal to the first image acquisition configuration (160, 860-1), wherein the first image acquisition configuration (160, 860-1) is configured to capture a
digital image of the XY scale (170, 870) at an image
acquisition time in response to receiving the first image acquisition trigger signal, and a
metrology position coordinate
processing section (190, 890) configured to input the captured image and to identify at least one corresponding mapping feature (IIF, AIF) of the XY scale (170, 870) contained in the captured image and the associated corresponding known XY scale coordinate location, and wherein the determination system for additional measurement position coordinates (150, 850) with a movable from the XY scale (170, 870) or the first image acquisition configuration (160, 860-1) coupled to the movable arm configuration (MAC, MAC') and the other configured to be coupled to a stationary element (STE) near the robot (110, 810), wherein the stationary from the XY scale (170, 870) or the first image acquisition configuration (160, 860-1) defines a first reference position (REF1, REF1'); a scale plane is defined such that it nominally coincides with the
planar substrate (SUB) of the XY scale (170, 870), and a direction normal to the scale plane is defined as a scale image acquisition axis direction (SIA, SIA'), and the robot system (100, 800) can be operated such that it at least nominally provides an operating configuration of the determination system for additional
metrology position coordinates (150, 850), wherein in the operating configuration of the determination system for additional
metrology position coordinates (150, 850) at least one of the XY scale (170, 870) and the first image acquisition configuration (160, 860-1) is arranged such that the
optical axis (OA1, OA1') of the first image acquisition configuration (160, 860-1) is parallel to the direction of the scale image acquisition axis direction (SIA, SIA') and that the scale plane is located within the
focus area of the first image acquisition configuration (160, 860-1) along the scale image acquisition axis direction (SIA, SIA'); The determination system for additional metrology position coordinates (150, 850) is configured such that when the movable arm from the XY scale (170, 870) or the first image acquisition configuration (160, 860-1) and the stationary arm from the XY scale (170, 870) or the first image acquisition configuration (160, 860-1) are arranged in the operating configuration and the movable arm configuration (MAC, MAC') is positioned such that the XY scale (170, 870) is in a
field of view (FOV, FOV') of the first image acquisition configuration (160, 860-1), the metrology position coordinate
processing section (190, 890) can be operated to determine the metrology position coordinates, which are a relative position between the movable arm from the XY scale (170, 870) or the first image acquisition configuration. (160, 860-1) and the first reference position (REF1, REF1') with an accuracy level that is better than the robot accuracy,based on determining the image position of the identified at least one corresponding imageable feature (IIF, AIF) in the captured image; and , The specified metrology position coordinates specify the end tool position (ETP, ETP') at the image
acquisition time with an accuracy level that is better than the robot accuracy, at least for a vector component of the metrology position coordinates that is transverse and / or perpendicular to the scale image acquisition axis direction (SIA, SIA').