50results about How to "Avoid accumulating errors" patented technology

The invention provides an automatic calibration method and system for a radio frequency power supply, and relates to the technical field of radio frequency power supplies. The method comprises the following steps: acquiring internal detection data and standard detection data of a radio frequency signal; obtaining internal detection data and standard detection data, and calculating a calibration compensation parameter according to the internal detection data and the standard detection data; and correcting the radio frequency power supply data acquired in real time by using the calibration compensation parameter. The method aims at solving the problems that an existing radio frequency power source calibration method is poor in real-time performance, limited in calibration precision, lack of data tracing and intelligentization, high in maintenance cost and the like, automatic calibration of the radio frequency power source can be achieved, limitation of traditional manual calibration is overcome, the real-time performance and precision of calibration are improved, the maintenance cost is reduced, and the calibration efficiency is improved. And a basis is provided for data tracing and intelligent management.