Visual observation system and measurement method of microcrystalline silicon thin film growth process

Abstract

The invention discloses a visual observing system for observing growth design of a microcrystalline silicon film in real time and a measurement method, which effectively improve the defect that a traditional polarization microscope is relatively low in resolution in an observing process. The visual observing system for the growth process of the microcrystalline silicon film comprises a light source, a pinhole, a polarizer, a 1 / 4 wave plate, a convergent lens, a beam splitting prism, a vertical objective lens, a sample, an objective table, a polarization analyzer, a CCD camera and a computer. The visual observing system has the beneficial effects that a scanning problem in a traditional film thickness detection method is effectively improved, the continuous dynamic detection of the film is realized, the detection efficiency and precision are improved, and the resolution is high; besides, the observing system disclosed by the invention is simple in structure, and the method is simple, convenient and feasible and is convenient to popularize.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and in particular relates to a visual observation system and method for the growth process of a microcrystalline silicon film. Background technique [0002] Since the 1990s, my country's solar photovoltaic industry has developed rapidly, especially in the past five years, the average annual growth rate of solar cells has reached an explosive level. As of 2010, the output of solar photovoltaic cells in my country has accounted for 50% of the world's output. However, in the past two years, there have been frequent reports that the development of my country's photovoltaic enterprises has been restricted. Analysis shows that excessive market expansion and relatively slow technological development are one of the main reasons for my country's photovoltaic industry to encounter bottlenecks. Therefore, in order to get rid of the crisis and make my country's photovoltaic industry develop towa...

AI Technical Summary

Problems solved by technology

However, the current polarized light microscopes generally have problems. First, the resolution is low in large-scale measurements. Second, the observation sample is relatively single, which cannot adapt to the observation of microcrystalline silicon thin films.

Images