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Pressure sensor based on MEMS

A pressure sensor and pressure technology, applied in the field of sensors, can solve problems such as narrow range and low precision, and achieve the effects of improving measurement accuracy, meeting weight requirements, and qualified performance

Active Publication Date: 2014-11-05
BEIJING INST OF CONTROL ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, most of the pressure sensors used in satellites are silicon piezoresistive pressure sensors. The pressure measurement range is generally 0-35MPa, and the measurement accuracy is 1%. The range is narrow and the accuracy is low. high precision requirements

Method used

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  • Pressure sensor based on MEMS
  • Pressure sensor based on MEMS
  • Pressure sensor based on MEMS

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Embodiment Construction

[0022] The MEMS-based pressure sensor according to the present invention will be further described in detail below with reference to the drawings and specific embodiments.

[0023] Such as figure 1 As shown, the MEMS-based pressure sensor according to the present invention includes a base 1, a lower cover 2, a bracket 3, a pressure sensitive core 4, an insulating pad 6, a signal processing circuit board 7, a housing 8, an electrical connector 12, and leads plate 13. The bracket 3 is used to protect the sensitive element core 4 and fix the lead plate 13 . The lead plate 13 is used to lead the power line and signal output line of the pressure sensitive core 4 to the signal processing circuit 7 . There are two insulating pads 6 for supporting the signal processing circuit 7 , and the insulating pads 6 are connected with the bracket 3 and the signal processing circuit 7 through screws 9 . The electrical connector 12 is connected and fixed to the housing 8 by screws and flat was...

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Abstract

The invention provides a pressure sensor based on MEMS. The pressure sensor based on MEMS comprises a base, a lower cover, a support, a pressure-sensitive core, an insulating pad, a signal processing circuit board, a shell, an electric connector and a lead board. The pressure-sensitive core is based on the sputtered film strain type principle and used for sensing pressure of a medium to be measured and outputting electric signals in proportion to pressure signal changes. A signal processing circuit is a highly integrated sensor signal processing circuit and used for supplying power to the pressure-sensitive core and meanwhile amplifying, calibrating and performing temperature compensation on signals output by the pressure-sensitive core, so that high-precision signal conditioning is achieved. The base and the shell provide connectors to pipelines and used for packaging the pressure-sensitive core and the signal processing circuit board. The pressure sensor is of an integrated structure, high in reliability, small in size, light in weight and suitable for accurately measuring the pressure of a high pressure gas cylinder of a small ultrahigh-pressure cool air propulsion system.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a MEMS-based pressure sensor for monitoring the pressure of a high-pressure gas cylinder in a tiny ultra-high pressure cold air propulsion system. Background technique [0002] The tiny ultra-high pressure cold gas propulsion system needs to use a pressure sensor to monitor the pressure of the high pressure cylinder to determine the remaining amount of gas. At present, most of the pressure sensors used in satellites are silicon piezoresistive pressure sensors. The pressure measurement range is generally 0-35MPa, and the measurement accuracy is 1%. The range is narrow and the accuracy is low. and high-precision requirements. [0003] For this reason, the technical problem urgently needed to be solved by those skilled in the art is to provide a high-precision pressure sensor structure to meet the needs of the micro ultra-high pressure cold gas propulsion system for the...

Claims

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Application Information

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IPC IPC(8): G01L9/04
Inventor 关威付新菊张恒龙军陈君李秀堂汪旭东肖静宋新河张良李恒建王焕春
Owner BEIJING INST OF CONTROL ENG
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