Method of tracking atomic force acoustical microscopy probe contact resonant frequency

A technology of resonant frequency and atomic force, which is applied in the field of tracking the resonant frequency of the probe contact of the atomic force acoustic microscope, can solve the problems of adverse effects on the imaging speed of the atomic force acoustic microscope, and achieve the effects of improved imaging speed, fast tracking and high sensitivity

Inactive Publication Date: 2014-11-19
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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Problems solved by technology

Chinese patent 201010194831.9 proposes to use sine wave sweep to track the change of probe contact resonance frequency. However, the sweep method requires the controller to send out a series of continuous sine waves with different frequencies, and needs to read back every driving frequency drop. The response state of the needle, which will inevitably have an adverse effect on the imaging speed of the atomic force acoustic microscope

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[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] Such as figure 1 Shown is the schematic diagram of the fast tracking method for the AFM probe contact resonance frequency. The laser 1 emits a laser beam from above the sample 4 and is reflected from the back of the probe 2 to the photoelectric sensor 3 above the sample 4. The probe 2 is in contact with the upper surface of the sample 4, and the sample ultrasonic transducer 5 is bonded below the sample 4. The sample 4 and the sample ultrasonic transducer 5 are stacked together on the XY scanner 6 . The photoelectric sensor 3 simultaneously outputs voltage signals to the feedback controller 7 , the main controller 10 and the lock-in amplifier 11 . The feedback controller 7 receives the signal from the photoelectric sensor 3 and then outputs a control voltage. On the one hand, the control voltage drives the Z scanner 8 to drive the probe...

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Abstract

The present invention relates to a method of tracking an atomic force acoustical microscopy probe contact resonant frequency. The method enables the single frequency square wave excitation to substitute for the sine wave frequency sweep based on a spectrum analysis method and by the fast Fourier transform (FFT), thereby avoiding the influence of a frequency sweep process to the imaging speed of the atomic force acoustical microscopy, and realizing the fast tracking of the atomic force acoustical microscopy probe contact resonant frequency.

Description

technical field [0001] The invention relates to a method for tracking resonance frequency of atomic force acoustic microscope probe contact. Background technique [0002] The atomic force acoustic microscope is a near-field acoustic imaging technology developed on the basis of the atomic force microscope. It is usually composed of an acoustic excitation and detection system added to the atomic force microscope. It allows us to observe and study the surface of materials at the nanoscale with sound waves. Acoustic imaging technology and subsurface microstructure have a wide range of application prospects in the biological field. [0003] Atomic force acoustic microscopy mainly starts from the detection end, and utilizes the characteristics of high imaging resolution of the scanning probe tip (with a radius of curvature of about 20nm) to improve the spatial accuracy of acoustic signal detection to the nanometer level. According to the different excitation methods of acoustic s...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/24
Inventor 陈代谢殷伯华韩立刘俊标林云生初明璋
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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