Piezoelectric tilt lens high-voltage driver with object frequency characteristic compensation function

Abstract

The invention discloses a piezoelectric tilt lens high-voltage driver with an object frequency characteristic compensation function. The piezoelectric tilt lens high-voltage driver comprises a communication interface (1), a digital compensator (2), a digital-to-analog converter (3) and a high voltage amplifier (4) and is characterized in that the communication interface (1) receives a digital control signal transmitted by a wave-front processor, the digital control signal is subjected to digital compensation in the digital compensator (2) and then enters the digital-to-analog converter (3) to be converted into an analog control signal, and the analog control signal is amplified by the high voltage amplifier (4) to become a high-voltage power signal for driving a piezoelectric tilt lens. The piezoelectric tilt lens high-voltage driver has the advantages that the amplitude response at the mechanical resonance frequency of the piezoelectric tilt lens can be compensated in real time by the digital compensator, influence of the mechanical resonance peak of the piezoelectric tilt lens on a self-adaptation optical servo system is solved, and the driver is applicable to high-speed and high-voltage driving of the piezoelectric tilt lens in the field of self-adaptation optical servo systems.

Description

technical field [0001] The invention relates to the field of adaptive optical systems, in particular to a high-voltage driver of a piezoelectric tilting mirror with the function of compensating the frequency characteristic of an object. Background technique [0002] The piezoelectric tilting mirror is one of the core devices of the adaptive optics system. Its main function is to use a piezoelectric driver with a resolution of nanometers and a response speed of milliseconds to drive a reflector. The driving voltage output by the high-voltage driver makes the beam Controlled high-speed two-dimensional deflection to correct the tilt of the optical system. The composition of the traditional piezoelectric tilting mirror high-voltage driver is as follows: figure 2 As shown, it includes a communication interface 1 , a digital-to-analog converter 3 and a high-voltage amplifier 4 . The communication interface 1 receives the digital control signal sent by the wave front processor, c...

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Problems solved by technology

For example, in the article "Methods of Improving the Application Bandwidth of High-speed Piezoelectric Tilting Mirrors" in "Optoelectronic Engineering" 2009, Vol. 36, No. 7, page 60, Zhu Heng et al. consider the use of lightweight mirror materials such as SIC from mechanical kinematics to reduce rotation. Inertia, or increase the structural rigidity of the driver and optimize the structural parameters to improve the mechanical resonance frequency of the piezoelectric tilting mirror itself, but its production is very difficult, and the mechanical resonance phenomenon of the fabricated piezoelectric tilting mirror still exists

However, Li Xinyang and others used analog network filter circuits to suppress mechanical resonance in the article "Stable Control of High-Speed ​​Tilting Mirrors in Adaptive Optical Systems" in "Strong Lasers and Particle Beams", Volume 1, Issue 1, 1999, Page 31 , but the engineering practicability of its analog filter network circuit is limited by factors such as parameter drift and difficulty in circuit adjustment

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