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A rapid test mechanism and test method for the centering of a lift-type evaporator

A testing mechanism and evaporator technology, applied in the direction of measuring devices, instruments, etc., can solve the problems of easy deviation of test points from the center line, poor accuracy, inconvenient operation, etc., to achieve the effect of convenient testing, guaranteeing effectiveness and improving efficiency

Active Publication Date: 2017-01-18
桑德斯微电子器件(南京)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Aiming at the problems existing in the prior art that the cavity needs to be lifted frequently, the test point is easy to deviate from the center line, the error is high, the accuracy is poor, and the operation is inconvenient. method

Method used

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  • A rapid test mechanism and test method for the centering of a lift-type evaporator
  • A rapid test mechanism and test method for the centering of a lift-type evaporator
  • A rapid test mechanism and test method for the centering of a lift-type evaporator

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] A rapid test mechanism for the centering of a lift-type evaporation machine, such as figure 1 , including a thickness measuring cover 1, a bell jar 2, a tripod 3, a fixed tripod seat 4, an electron gun 5, a transparent offset plate 14 and an emission point light source adjustment device. The bell jar 2 is made of transparent glass, the thickness measuring cover 1 is located on the top of the bell jar 2, and the thickness measuring cover 1 is built with a sensor probe for measuring thickness. The middle part of the bell jar 2 is equipped with a fixed tripod seat 4, and the tripod 3 is installed on the top of the fixed tripod seat 4, and the bottom of the fixed tripod seat 4 is a ring, and the ring is connected to the tripod 3 by a support, and the tripod 3 There is a hole in the center, an electron gun 5 is arranged at the bottom of the bell jar 2, and a crucible is placed in the electron gun 5 . The outer side of the bell jar 2 is provided with a guide rod 7, the botto...

Embodiment 2

[0046] Embodiment 2 is basically the same as Embodiment 1, the difference is that, in step e, the bell jar 2 is lifted and lowered 3 times to test whether the position of the point light source is in the same position as in step e. At the center position, the position of the point light source does not fall on the center position. Repeat steps (a)-(d) to successfully make the position of the point light source always fall on the center position.

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Abstract

The invention discloses a lifting type evaporator table centering rapid testing mechanism and a testing method thereof and belongs to the field of evaporator table testing. The lifting type evaporator table centering rapid testing mechanism comprises a thickness measuring cover, a cloche, a triangular support, a fixed triangular support seat, an electron gun, a transparent offset plate and an emitting point light source adjusting device. The thickness measuring cover is arranged at the top of the cloche, and a sensor probe for testing thickness is arranged inside the thickness measuring cover; the middle of cloche is provided with the fixed triangular support seat, the outer side surface of the cloche is provided with a guide rod, the bottom of the guide rod is connected with the bottom of the cloche, and the guide rod is provided with a positioning clamp; the emitting point light source adjusting device is arranged at the crucible of the electron gun and composed of a light source device and a fixing jacket; the transparent offset plate is arranged above the triangular support or the thickness measuring cover and provided with a thickness measuring cover positioning point mark and a triangular support positioning point. The lifting type evaporator table centering rapid testing mechanism can help find errors generated during usage of equipment intuitively and avoid deviation of testing points from a central line, and accordingly, is high in accuracy, convenient and rapid.

Description

technical field [0001] The invention relates to the field of evaporating machine testing, and more specifically, relates to a rapid centering testing mechanism and a testing method for a lift-type evaporating machine. Background technique [0002] With the application of evaporation machines in the microelectronics industry, and the increasingly rapid development of microelectronics technology, the shortcomings of evaporation coatings are also affecting the quality of products. Evaporation coating has the advantages of fast film forming speed and high purity, but the repeatability of the process is not good enough, and the shortcomings of difficult control of film thickness are increasingly restricting the development of this process. Eliminating the influence on the process caused by the defects of the equipment's own design in the process is a more practical way to solve and improve the evaporation technology. [0003] The movement of metal atoms in vacuum is basically a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B21/08C23C14/24
Inventor 谈步亮刘韵吉杨敏红何慧强陈道友
Owner 桑德斯微电子器件(南京)有限公司
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