Method for efficiently producing high-precision multistep microlens array

Abstract

The invention relates to a method for efficiently producing a high-precision multistep microlens array. The method includes that the step array to be produced is divided into multiple groups including a first group and a second group, the first group and the second group are connected end to end, and steps of each group are continuous in depth; the steps of the first group and the second group are synchronously produced to form two groups of steps identical in corresponding depth; the steps in the second group are integrally etched by certain depth and form the step array continuous in depth with the steps in the first group. By the method, the steps in different groups are created synchronously, so that producing efficiency is greatly improved, and cost is saved.

Description

technical field

[0001] The invention relates to a method for making a multi-step microlens array. Background technique

[0002] The microlens array is an array composed of a series of tiny lenses with diameters of millimeters and micrometers in a certain arrangement. Micro-lenses and micro-lens arrays produced by micro-optical technology have become a new direction of scientific research and development due to their advantages of small size, light weight, easy integration, and arraying.

[0003] With the rapid development of modern information technology, the application of microlenses in various fields is becoming more and more extensive. From the current point of view, microlenses play a pivotal role in both military and civilian applications. In some developed countries such as Japan, the United States, the United Kingdom, and Germany, the research on microlenses has attracted great attention from government departments, and they are competing to invest in the developme...

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