The embodiment of the present application discloses an
exposure device and a combined
mask thereof, wherein the combined
mask comprises a first
metal layer, a plurality of
first light transmission holes are formed in the first
metal layer; a second
metal layer is arranged opposite to the first metal layer, a plurality of second
light transmission holes are formed in the second metal layer, and the second
light transmission holes are arranged corresponding to the
first light transmission holes along an
optical axis. The present application filters the oblique light in the
light beam through the multiple metal
layers, ensures that all the light rays in the
light beam propagate along the
optical axis direction, increases the parallelism of all the light rays in the
light beam, makes the dispersion of the
laser beam lower, and further enables the
laser beam to perform accurate
etching under a large gap. The technical problem that the parallelism of the light path of the current proximity
exposure machine is not high in the prior art, the formed
laser beam is relatively dispersed, and a lower gap needs to be used is solved.