The invention provides an etching device for manufacturing an integrated optoelectronic device, which comprises a main body, a driving mechanism is arranged in the main body, a driving shaft is arranged on the driving mechanism, an etching device is arranged on the driving shaft, a fixing component is arranged on the inner wall of the main body, and the fixing component is arranged on the inner wall of the main body. An offset sensing assembly, a linkage assembly and a correction assembly are arranged on the fixing part; the deviation induction assembly comprises an induction air cushion, a movable part, an induction main rod and a guide part. According to the etching device for manufacturing the integrated optoelectronic device, by arranging the correction assembly, once the etching device shakes, the etching device inevitably drives the driving shaft to synchronously shake, and the correction main rod is utilized to drive the correction piece to be in contact with the driving shaft, so that the driving shaft which deviates due to shaking is corrected; therefore, the problem of jittering of the etching device is fundamentally solved, the etching effect of the etching device on the integrated optoelectronic device is improved, and meanwhile, the reliability of the equipment is effectively improved.