Etching device
A technology of etching device and accommodating part, which is applied in the direction of feeding device, chemical/physical/physical-chemical fixed reactor, chemical instrument and method, etc., can solve the problems of poor etching effect, etc. The effect of etching efficiency
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[0048] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are intended to explain the present invention and is not intended to limit the invention.
[0049] Please refer to Figures 1 to 10The etching apparatus provided by the present invention will be described. The etching apparatus includes a base 1, a receiving member 2, a turntable 3, a translation 4, and a jet flow member 5.
[0050] The base 1 adopts a table body having four legs, and the upper surface is a desktop of the table.
[0051] The accommodating member 2 is detachably disposed on the base 1, and the upper surface of its own has a housing chamber 21, and the top also has a top cover 22, and the top cover 22 can be achieved by loading the top cover 22 to the...
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