Etching liquid system and etching method of aluminum nitride substrate
A technology of etching solution and system, which is applied in chemical instruments and methods, surface etching compositions, semiconductor/solid-state device manufacturing, etc., can solve the problems of low practicability and few etching methods, and achieve strong etching ability and high High-precision etching and high-quality etching effects
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Embodiment 1
[0036] The preparation of embodiment 1 etching solution system
[0037] The formula of the first etching solution is as follows in Table 1.
[0038] Table 1 The mass percent of each component of the first etching solution
[0039]
[0040] The configuration raw material of the first etching solution:
[0041] The ammoniacal liquor selects the ammoniacal solution of 5%-15% mass fraction for use;
[0042] The strong oxidant is selected from 20%-40% mass fraction of hydrogen peroxide solution or potassium permanganate solution / potassium permanganate configuration to achieve the same effect;
[0043] The complexing agent is an amino hydroxy acid salt compound, including one or more of sodium nitrilotriacetate, ethylenediaminetetraacetic acid salt, and diethylenetriaminepentacarboxylate, and the complexing agent with a mass fraction >95% is selected. agent.
[0044] The first etching solution configuration steps are as follows:
[0045] Add pure water into the glass contain...
Embodiment 2
[0056] Embodiment 2 The etching method of aluminum nitride ceramic substrate
[0057] The structure of the etched aluminum nitride ceramic substrate is as follows: figure 1 As shown, the aluminum nitride substrate 1 is followed by a solder joint layer 2 and a copper foil 3 , and the solder joint layer 2 and copper foil 3 have a solder joint layer etched area 20 and a copper foil etched area 30 that need to be removed by etching. Such as figure 2 As shown, the solder bonding layer 2 includes a copper-silver eutectic layer 21 , a nitrogen-titanium reaction layer 22 and an aluminum-titanium intermetallic compound 23 , and the corresponding etching regions are 201 , 202 and 203 respectively.
[0058] The etching process of aluminum nitride ceramic substrate is as follows: image 3 shown, including the following steps:
[0059] (a) metal copper layer etching
[0060] After the aluminum nitride ceramic substrate is pasted, exposed, and developed, the exposed metal copper layer ...
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