3results about How to "Efficient etching" patented technology

This invention provides a method for fabricating a stepped metal structure and a silicon photonic device, comprising: 1) forming a stepped structure on a substrate; 2) depositing an isolation dielectric layer on the stepped structure; 3) depositing a metal layer, wherein the thickness of the top surface metal is greater than the thickness of the sidewall metal; 4) forming a pattern barrier layer on the metal layer; 5) dry etching the exposed second portion of the top surface metal, such that the thickness of the second portion of the top surface metal is approximately equal to that of the second portion of the sidewall metal; 6) removing the exposed second portion of the top surface metal and the second portion of the sidewall metal using an isotropic etching process. This invention combines dry metal etching and isotropic etching techniques. By further adjusting the etching thickness ratio of dry metal etching and isotropic etching, the lateral corrosion of the metal layer at the cross-sectional position of the top surface of the stepped structure can be reduced, and the lateral corrosion size of the metal layer can be more controllable.

The application provides a three-dimensional laser etching method based on tire cylindrical coordinates, which establishes a plane design polar coordinate based on the shape characteristics of the tire in the design, gives a reference point coordinate and an etching coordinate polar radius and polar angle, obtains a polar radius deviation value and a polar angle deviation value through operation to determine the relative plane position of the etching point to the reference point; the polar coordinate is established on the tire conveying surface, the polar point is the center of the tire; the polar axis is established in the opposite direction by connecting the polar point and the projection point of the base coordinate origin of the robot in the polar coordinate; the Z axis passes through the polar point, is perpendicular to the polar coordinate plane and faces upward to establish a three-dimensional cylindrical coordinate; based on the three-dimensional coordinate, the robot performs 3D camera scanning and modeling; through calculation of the running coordinate of the sixth axis and the coordinate conversion with the base coordinate of the robot, after the sixth axis center of the robot runs to the second center, the sixth axis is rotated by an angle to perform laser etching.

The invention provides a laser direct writing method suitable for a two-dimensional code in frosted surface microcrystalline glass, and the method specifically comprises the following steps: receiving two-dimensional code information to be processed, and compiling the two-dimensional code information into a corresponding space coding pattern; starting a beam shaping unit, dynamically adjusting multi-beam distribution and energy parameters of a laser beam according to the geometric distribution condition of a space coding pattern, and enabling a modified trace formed by a laser focus array in the microcrystalline glass to be matched with a design pattern of the two-dimensional code; when a glass ceramic sample is completely immersed in the matching liquid, after full-surface uniform coverage is realized by virtue of physical characteristics of the liquid, a light beam focusing unit is started, and a shaped laser beam is focused to a specified depth position in the glass ceramic for multi-light-beam parallel processing; therefore, a high-quality two-dimensional code which accords with coding characteristics and is clear in edge is etched in the frosted surface microcrystalline glass.