The application discloses a spectrum shift type
hydrogen sensor and a preparation method thereof, and comprises a
silicon substrate, a suspended micro-bridge formed by local
etching and releasing of the
silicon substrate, and a
nanowire array arranged on the suspended micro-bridge, wherein the
nanowire sensitive structure in the
nanowire array comprises, from inside to outside, a
gold core, a
palladium shell layer coated on the periphery of the
gold core, an air gap located outside the
palladium shell layer, an annular gold shell layer arranged around the air gap, and a porous
alumina filling layer reserved in the final device and filled outside the annular gold shell layer; a
temperature control circuit is connected with the suspended micro-bridge and used for controlling the
working temperature of the suspended micro-bridge; wherein the nanowire sensitive structure is subjected to plasmonic
resonance spectrum peak displacement under the action of
hydrogen, and the air gap and the annular gold shell layer form a radial
coupling cavity for amplifying the readout amplitude of the spectrum peak displacement. The application can realize high-sensitivity, fast-
recovery and high-stability
hydrogen spectrum detection.