The invention provides a
monocrystalline silicon wafer with grooves in the surface, a
heterojunction solar cell and a preparation method. Grooves are formed in the front face and the back face of the
silicon wafer, the depth of each groove ranges from 5 micrometers to 50 micrometers, the width of each groove ranges from 10 micrometers to 100 micrometers, the internal morphology of each groove comprises one or two of a step shape and a
pyramid shape, the surface morphology of the
monocrystalline silicon wafer outside the grooves comprises a
pyramid shape, and the surfaces of the steps and the
pyramid correspond to the
crystal face (111) of the
silicon crystal. The distance between adjacent
step edges on the same inclined plane is 0.1-10 [mu]m, and the height of the pyramid is 0.1-10 [mu]m. When the method is used for preparing the
heterojunction solar cell, the contact area of the grid line and the transparent conductive film can be increased, the
filling factor FF of the
solar cell and the
welding tension of the
electrode can be improved, the shading area of the grid line can be reduced, and the short-circuit current Isc can be obviously improved; meanwhile, consumption of
silver paste can be reduced, and efficiency improvement and cost reduction of the solar
cell are achieved. In addition, the conductive performance of the
silver paste and the speed of silk-
screen printing are improved, so that the productivity of equipment is improved.