External Resonator Type Light Emitting System
A technology of external resonators and light-emitting devices, which is applied to the structure of optical resonant cavities, instruments, optics, etc., and can solve problems such as changes in light intensity
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[0137] (Example)
[0138] made as Figure 1-Figure 3 device shown.
[0139] Specifically, a film of Ni is formed on a substrate in which MgO-doped lithium niobate crystals are cut into z-plates, and a grating pattern is fabricated in the y-axis direction by photolithography. Thereafter, reactive ion etching is performed through the mask Ni pattern, thereby forming a pitch (pitch) interval Λ of 180 nm and a length L b 100μm grating groove. The groove depth of the grating is 300nm. In addition, in order to form an optical waveguide propagating in the y-axis, the grating portion was subjected to groove processing with a width Wm of 3 μm and a Tr of 0.5 μm using an excimer laser. Further, on the trench formation surface, the SiO 2 The buffer layer 17 formed was formed at a thickness of 0.5 μm, and a black LN substrate was used as a support substrate, and the grating formation surface was bonded. Here, the black LN substrate refers to, from LN (LiNbO 3) crystallization remov...
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