Abrasive for polishing and manufacturing method of substrate using same
A technology for grinding materials and grinding processes, applied in chemical instruments and methods, manufacturing tools, grinding devices, etc., can solve problems such as variation, achieve excellent characteristics, excellent productivity, and improve the effect of grinding speed
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Embodiment 101、102、 comparative example 101、102
[0045] Preparation of abrasive material for polishing and composition for polishing
[0046] First, brown corundum and zircon sand are prepared and compounded, thereby preparing an abrasive material for polishing. The respective average particle diameters and compounding ratios are shown in Table 1. In addition, in order to confirm the variation of the experimental result, the abrasives for polishing of Comparative Examples 101a-101c and Comparative Examples 102a-102c were respectively prepared equivalent abrasives.
[0047] In the polishing test, 1400 g of water and 30 g of a commercially available polishing oil were mixed with 300 g of these abrasives, and dispersed with a mixer to prepare a polishing composition.
[0048] Polishing test
[0049] The polishing test was performed under the following conditions.
[0050] Silicon wafers with a diameter of 62.6 mm were selected as workpieces, and four of them were mounted in batches on a polishing machine (device name: 4B...
Embodiment 201、202、 comparative example 201、202
[0078] Evaluation of recycling characteristics
[0079] Evaluation of recycling characteristics was performed as follows. First, using the prepared polishing composition, polishing was performed according to the method described above. Thereafter, the entire amount of the used composition is recovered, and a new wafer is polished using the composition as it is. Then, the operation of recovering the composition and performing the next polishing process is further repeated.
[0080] Each composition was subjected to polishing processing 10 times, and the polishing rate and surface roughness at each stage were measured. The obtained results are shown in Table 2. In addition, about the composition used in Example 201,202, and comparative example 201,202, the composition of the same composition as Example 101,102, and comparative example 101,102 was used. In addition, the same evaluation experiment was performed twice about Examples 201 and 202.
[0081] [Table 2]
[0082] ...
Embodiment 301～303
[0083] Examples 301-303, Comparative Examples 301, 302
[0084] Preparation of abrasive material for polishing and composition for polishing
[0085] Brown corundum and zircon sand are prepared and compounded to prepare abrasive materials for polishing. The respective average particle diameters and compounding ratios are shown in Table 3. Next, 1400 g of water and 30 g of a commercially available polishing oil were mixed with 300 g of these abrasives, and dispersed with a mixer to prepare a polishing composition.
[0086] [table 3]
[0087]
[0088] Evaluation of recycling characteristics
[0089] The recycling characteristics were evaluated using the obtained polishing composition. During the evaluation, the polishing process was performed under the same conditions as in Example 201 except that the supply rate of the polishing composition was changed to 50 cc / min and the machining time was changed to 20 minutes.
[0090] The obtained results are shown in Table 4...
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