Optical Path for Detection of Thermal Deformation of Optical Thin Film Components
An optical film and detection optical path technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of inability to detect modulated light spots and the detection of beam modulation effects, achieving a wide range of applications and avoiding interactive effects.
Active Publication Date: 2017-08-25
RES INST OF PHYSICAL & CHEM ENG OF NUCLEAR IND
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However, the above-mentioned optical path can only realize the verification of the influence of window deformation on the quality of the near-field beam, and cannot detect the modulated spot at different distances of beam transmission. At the same time, this optical path is only for the verification of the optical window, and cannot be applied to the modulation of the beam by thermal deformation of other optical thin film components. role detection
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[0019] Below, the present invention is described in detail with reference to accompanying drawing and embodiment:
[0020] Such as figure 1 As shown, the detection optical path of the thermal deformation of the optical thin film element includes the irradiation optical path formed by the solid-state laser 1 and the incident optical path formed by the solid-state He-Ne laser 12, and the He-Ne laser 12 is respectively provided with collimation Lens 11, beam expander lens 10, optical window 9 and the second light-guiding reflector 8, the second light-guiding reflector 8 of inclination transmits the light beam through the first light-guiding reflector 7 that is parallel with it to the reflective cavity mirror that is parallel to each other. 5 and the optical cavity formed by the spot cavity mirror 6; the solid-state laser 1 is respectively provided with a coupling focusing lens group 2, an energy fiber 3 and a shaping lens group 4 from near to far, and the light beam passing throu...
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The invention discloses a detection light path for the thermal deformation of an optical thin film element. The detection light path comprises an irradiation light path formed by a solid laser and an incident light path formed by a solid He-Ne laser, wherein a collimating lens, an expanded beam lens, an optical window and a second light guide reflecting mirror are arranged on the He-Ne laser from near to far; a second inclined light guide reflecting mirror transmits a light beam into a light cavity formed by a reflecting cavity mirror and a light spot cavity mirror, which are parallel, through the first light guide reflecting mirror parallel to the second light guide reflecting mirror; a coupling focusing lens group, an energy optical fiber and a reshaping lens group are arranged on the solid laser from near to far; a light beam passing through the reshaping lens group is obliquely incident into the optical window. According to the detection light path, a low-power light path and a high-power light path are independent, so that the interactive influence of the irradiation light path on the incident light path is avoided; the detection light path is wide in application range, and can be used for the light beam modulation detection of the thermal deformation of various optical thin film elements and optical substrates.
Description
technical field [0001] The invention belongs to a detection optical path, in particular to a detection optical path for the influence of thermal deformation of an optical thin film element on the transmission performance of a light beam. Background technique [0002] Optical thin-film components are the most used and one of the most important components in lasers and related optical transmission systems. When a strong laser beam acts on the surface of optical thin-film components, whether it is a transmissive component coated with an anti-reflection coating or a reflective component coated with a reflective film For optical components, the surface of the optical component is deformed due to the absorption of laser energy by the optical thin film component. It is not obvious for low power beams, but high power lasers will cause a sharp temperature rise of optical components and cause large deformation. The deformation of optical components causes wavefront distortion, which ...
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IPC IPC(8): G01B11/16
Inventor 刘丽娜陈志理张元芫安振杰
Owner RES INST OF PHYSICAL & CHEM ENG OF NUCLEAR IND