Microbeam X-ray spectral fluorometer

Abstract

The invention relates to a microbeam X-ray spectral fluorometer. A high-accuracy laser displacement sensor with resolution less than 5 micrometers detects a distance between a sample and the laser displacement sensor; a signal of the distance H is converted into a digital signal via a digital-to-analog conversion card to be transmitted to a computer; the computer transmits the signal to a stepping motor controller; the stepping motor controller transmits the signal to a stepping motor driver; and then the stepping motor driver drives a four-dimensional sample table driven by four stepping motors to move in X, Y, Z and theta directions to keep a tested point of the sample to be in a position of a back focal distance of a capillary X-ray lens.

Description

technical field [0001] The invention relates to an X-ray fluorescence analysis spectrometer, in particular to a micro-beam X-ray fluorescence spectrometer. Background technique [0002] X-ray fluorescence analysis spectrometer is an important analytical method for non-destructive analysis of element content in various samples. Its principle is that the X-ray beam emitted from the X-ray source (such as X-ray tube, etc.) The electrons in the inner layer of the atomic nucleus contained in the element are excited by the irradiated X-rays to leave vacancies, and the electrons outside the nucleus jump to the inner layer vacancies and emit X-rays with characteristic energy. The X-ray detector receives the characteristic X-rays emitted by the elements in the sample After passing through electronic systems such as preamplifiers, main amplifiers, and multi-channel analyzers, the element types and element contents can be identified according to the characteristic energy emitted by the ...

AI Technical Summary

Problems solved by technology

However, in micro-beam X-ray line scanning and surface scanning, due to the unevenness of the sample surface, the distance between different positions of the tested sample and the outlet of the capillary X-ray lens is greater or smaller than the back focus of the capillary X-ray lens, resulting in The diameter of the X-ray spot that irradiates the sample is larger than the focal spot of the capillary X-ray lens, and at the same time the intensity of the irradiated sample point becomes smaller, which brings errors to the resolution and analysis data of line scanning and area scanning

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