A kind of LED chip with highly reflective electrode and preparation method thereof
A LED chip and electrode technology, applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems of electrode drop, poor adhesion, and inability to solve the problem of metal electrode shading and light absorption, so as to reduce use, improve adhesion, and improve Luminous Efficiency and Effect of Service Life
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Embodiment 1
[0025] Embodiment 1: as figure 2 As shown, the preparation method of the present invention includes (1) sequentially growing the bottom Si-doped n-type semiconductor layer 1, the InGaN / GaN multi-quantum well active region 2 and the uppermost Mg-doped p-type semiconductor layer on the substrate. The semiconductor layer 3; (2) performing ICP etching on part of the p-type semiconductor layer 3 and the multi-quantum well active region 2 to expose the n-type semiconductor layer 1; (3) making an n-type electrode on the exposed n-type semiconductor layer 1, Make a p-type electrode on the unetched p-type semiconductor layer 3, wherein, the method for making the p-type electrode comprises the following steps:
[0026] Step 1: Plating a transparent conductive layer 4 on the p-type semiconductor layer 3, the selected material is ITO.
[0027] Step 2: plate an adhesive current blocking layer 5 on the transparent conductive layer 4, and the selected material is Al made by MOCVD 2 o 3 ,...
Embodiment 2
[0033] Embodiment 2: as figure 2 As shown, the preparation method of the present invention includes (1) sequentially growing the bottom Si-doped n-type semiconductor layer 1, the InGaN / GaN multi-quantum well active region 2 and the uppermost Mg-doped p-type semiconductor layer on the substrate. The semiconductor layer 3; (2) performing ICP etching on part of the p-type semiconductor layer 3 and the multi-quantum well active region 2 to expose the n-type semiconductor layer 1; (3) making an n-type electrode on the exposed n-type semiconductor layer 1, Make a p-type electrode on the unetched p-type semiconductor layer 3, wherein, the method for making the p-type electrode comprises the following steps:
[0034] Step 1: Plating a transparent conductive layer 4 on the p-type semiconductor layer 3, the selected material is ZnO.
[0035] Step 2: plate an adhesive current blocking layer 5 on the transparent conductive layer 4, and the selected material is Al made by MOCVD 2 o 3 ,...
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