Graphene-clad atomic force microscope probe and manufacturing method and application thereof

An atomic force microscope and graphene-coated technology, applied in scanning probe technology, scanning probe microscopy, measuring devices, etc., can solve the problem of difficult removal of PMMA, large radius of curvature of the probe tip, and influence on lateral resolution, etc. Problems, to avoid adverse effects, high resolution, low wear effect

Inactive Publication Date: 2015-02-18
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are two major problems in the probe made by covering the copper mold with graphene: 1. This preparation method needs a brand-new production and processing technology, the cost is high and requires professional operation, and the conditions are harsh; 2. The probe tip made has Larger radius of curvature affects lateral resolution
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Method used

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  • Graphene-clad atomic force microscope probe and manufacturing method and application thereof
  • Graphene-clad atomic force microscope probe and manufacturing method and application thereof
  • Graphene-clad atomic force microscope probe and manufacturing method and application thereof

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Effect test

Embodiment 1

[0038] (1) Preparation of graphene solution: 5 mg graphene was added to 1 mL water, and ultrasonically dispersed in an ultrasonic cleaner for 10 min to prepare a graphene solution with a concentration of 5 mg / mL;

[0039] (2) Preparation of graphene-coated atomic force microscope probe: immerse the tip of the atomic force microscope probe whose substrate is silicon, cantilever and tip are provided with double metal layers of titanium and platinum from the inside to the outside respectively in step (1) In the graphene solution, it was mechanically stirred for 60 s and then taken out to dry naturally. The graphene layer in the prepared graphene-coated AFM probe is 1 layer with a thickness of 0.34 nm.

Embodiment 2

[0041] (1) Preparation of graphene solution: 10 mg graphene was added to 1 mL water, and ultrasonically dispersed in an ultrasonic cleaner for 10 min to prepare a graphene solution with a concentration of 10 mg / mL;

[0042] (2) Preparation of graphene-coated atomic force microscope probe: immerse the tip of the atomic force microscope probe whose substrate is silicon nitride, cantilever and single metal layer of platinum-iridium alloy on the tip into the graphene solution in step (1) , after mechanical stirring for 30s, take it out and let it dry naturally. The prepared graphene-coated AFM probe has three graphene layers with a thickness of 1 nm.

Embodiment 3

[0044] (1) Preparation of graphene solution: 7 mg of graphene was added to 1 mL of water, and ultrasonically dispersed in an ultrasonic cleaner for 10 min to prepare a graphene solution with a concentration of 7 mg / mL;

[0045] (2) Preparation of graphene-coated atomic force microscope probe: immerse the tip of the atomic force microscope probe whose substrate is silicon, cantilever and tip are provided with double metal layers of titanium and platinum from the inside to the outside respectively in step (1) In the graphene solution, it was mechanically stirred for 45 s and then taken out to dry naturally. The prepared graphene-coated AFM probe has two graphene layers with a thickness of 0.68 nm.

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Abstract

The invention belongs to the field of atomic force microscopes and relates to a graphene-clad atomic force microscope probe and a manufacturing method and application thereof. The graphene-clad atomic force microscope probe comprises a probe base, a cantilever arm and a tip; the cantilever arm and the tip are provided with a metal layer; the tip is further provided with a graphene layer. The manufacturing method includes the steps of 1, preparing graphene solution, to be specific, adding 5-10mg of graphene to 1mL of water, and performing ultrasonic dispersion for 10min with an ultrasonic cleaner to obtain 5-10mg/mL graphene solution; and 2, preparing the graphene-clad atomic force microscope probe, to be specific, dipping the tip of the atomic force microscope probe with the metal layer on the cantilever arm and the tip, into the graphene solution of the step 1, and performing mechanical stirring for 30-60s before extracting the probe to allow natural airing.

Description

technical field [0001] The invention belongs to the field of atomic force microscopes, and relates to an atomic force microscope probe and its preparation method and use, in particular to a durable graphene-coated atomic force microscope probe and its preparation method and use. [0002] Background technique [0003] Atomic force microscope (AFM) is an important instrument with atomic-level resolution for surface topography collection and electromagnetic performance analysis, and is an important characterization tool in the fields of surface science and nanotechnology. Among them, the AFM probe is an important part of the atomic force microscope and is a commonly used consumable for this high-tech equipment. Its main manufacturers are distributed in Germany, Switzerland, the United States, Japan and other countries. Ordinary AFM probes are mainly prepared by processing silicon or silicon nitride using MEMS technology, while conductive AFM probes are plated with 10-50 nm thi...

Claims

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Application Information

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IPC IPC(8): G01Q60/40
CPCG01Q60/40
Inventor 惠飞马里奥·兰扎石媛媛
Owner SUZHOU UNIV
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