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Production technology for manufacturing glass optical waveguide of optical branching device

A technology of optical splitter and production process, which is applied in the direction of optical waveguide light guide, light guide, optics, etc., can solve the problems of incomplete ion exchange, poor quality of glass optical waveguide, and failure to remove it, so as to achieve improved Time, exchange completely fast, good quality effect

Inactive Publication Date: 2015-02-25
成都康特电子高新科技有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Optical splitters are generally made on six materials, including lithium niobate, semiconductor compounds, silicon dioxide, silicon-on-insulator, polymers, and glass. Nowadays, glass light guides are used to make optical splitters. Since the existing manufacturing process does not have aluminum The film layer, or the aluminum film layer was not removed later, resulting in the incomplete ion exchange in the end, resulting in poor quality of the final glass optical waveguide

Method used

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  • Production technology for manufacturing glass optical waveguide of optical branching device

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Embodiment 1

[0018] Such as figure 1 Shown, the present invention comprises the production technology that is used to make the glass optical waveguide of optical splitter, comprises the steps:

[0019] A. The grinding layer is made by sputtering a layer of aluminum on the glass substrate as a mask layer during ion exchange;

[0020] B. Photolithography treatment, the required waveguide pattern is protected with photoresist;

[0021] C. Remove the aluminum film, and use chemical corrosion to remove the aluminum film on the upper part of the waveguide;

[0022] D. Fabrication of channel-type optical waveguide, put the masked glass substrate into a mixed solution containing silver ions and sodium ions, and perform ion exchange to obtain channel-type optical waveguide;

[0023] E. Fabrication of buried glass optical waveguide, applying an electric field to the channel optical waveguide, moving silver ions to the depth of the glass substrate to obtain the buried glass optical waveguide. In t...

Embodiment 2

[0025] The preferred scheme of this embodiment on the basis of Example 1 is as follows: in step D, the ion exchange temperature range is between 25°-35°. Ion exchange is faster in this temperature range, increasing the time to product.

[0026] The etching of the aluminum film in step B is performed by dilute acid etching or alkali etching.

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Abstract

The invention discloses a production technology for manufacturing a glass optical waveguide of an optical branching device. The production technology comprises the steps of manufacturing a grinding layer, wherein an aluminum layer is sputtered on a glass substrate to be used as a mask layer adopted during ion exchange; conducting photoetching treatment, wherein a needed waveguide pattern is protected by a photoresist; removing an aluminum film, wherein the aluminum film at the upper portion of the waveguide is removed by the adoption of chemical corrosion; manufacturing a channel type optical waveguide, wherein the glass substrate with the mask is placed into a mixed solution containing silver ions and sodions for ion exchange to obtain the channel type optical waveguide; manufacturing the buried type glass optical waveguide, wherein an electric field is applied on the channel type optical waveguide, and the silver ions are made to tend towards the deep position of the glass substrate to obtain the buried type glass optical waveguide. According to the production technology, on the basis of the principle, exchange between the silver ions and the sodions can be more complete and rapider, the silver ions can be made to better tend towards the deep position of the glass substrate, and the quality of the obtained glass optical waveguide is better.

Description

technical field [0001] The invention relates to the field of manufacturing optical splitters, in particular to a production process for glass optical waveguides used for manufacturing optical splitters. Background technique [0002] Like the coaxial cable transmission system, the optical network system also needs to couple, branch, and distribute optical signals, which requires optical splitters to achieve. Optical splitter, also known as optical splitter, is one of the important passive devices in optical fiber links. input terminals and N output terminals. Optical splitters used in fiber optic CATV systems are generally 1×2, 1×3 and 1×N optical splitters composed of them. Optical splitters are generally made on six materials, including lithium niobate, semiconductor compounds, silicon dioxide, silicon-on-insulator, polymers, and glass. Nowadays, glass light guides are used to make optical splitters. Since the existing manufacturing process does not have aluminum The fil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/134G02B6/13
CPCG02B6/1345G02B6/136G02B6/138G02B2006/12038
Inventor 余波宗瑞朝黎林青晓英杜泽永
Owner 成都康特电子高新科技有限责任公司