Evaporation device and its waterproof refueling method
A technology of evaporation and evaporation source, which is applied in the directions of vacuum evaporation plating, sputtering plating, ion implantation plating, etc., which can solve the problems of product yield decline, vacuum degree reduction, difficulty in adjusting to the ideal range, etc.
Active Publication Date: 2017-05-17
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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For the cathode evaporation chamber, it contains a magnesium metal evaporation source, which makes the surfaces of the shield cover and the chamber wall that block the evaporation source be coated with a layer of magnesium due to the previous heating and evaporation coating operation. Metal, while magnesium metal is more likely to react with the previously adsorbed moisture in the subsequent process of re-evacuating the closed cavity for pre-baking. The reaction formula is: 2Mg+2H 2 O=Mg(OH) 2 +H 2 , and then generate hydrogen to reduce the vacuum degree, making it difficult to adjust the vacuum degree to the ideal range, thus causing the production interruption of organic light-emitting diode products and the decline in the yield rate of products
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[0021] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the present invention can be practiced. Furthermore, the directional terms mentioned in the present invention are, for example, up, down, top, bottom, front, back, left, right, inside, outside, side, surrounding, central, horizontal, transverse, vertical, longitudinal, axial, The radial direction, the uppermost layer or the lowermost layer, etc. are only directions referring to the attached drawings. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention.
[0022] Please refer to figure 1 As shown, the evaporation device 100 of an embodiment of the present invention, wherein the evaporation device 100 includes an evaporation chamber 2, a first evaporation source 3, a first shielding unit 4, a second evaporation source 5. A second shielding unit 6 , a third...
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The invention discloses an evaporation device and a waterproof material changing method of the evaporation device. The evaporation device comprises an evaporation cavity, a first evaporation source, a first shielding unit, a second evaporation source and a second shielding unit. The first evaporation source has reactionlessness on moisture, and the second evaporation source has reactivity on moisture. The second shielding unit is provided with a second support and a second shielding cover, the second support is rotationally arranged between the first evaporation source and the second evaporation source, and the second support is used for rotating the second shielding cover so as to shield one of the first evaporation source and the second evaporation source.
Description
technical field [0001] The present invention relates to an evaporation device and its refueling operation method, in particular to an evaporation device and its refueling operation method which can prevent the inner wall of the cavity from reacting with water vapor during the refueling operation. Background technique [0002] An organic light emitting diode (OLED) is mainly composed of an organic material coating and a substrate (such as a glass substrate), and the organic material emits light when a current passes through it. Organic light-emitting diodes have the advantages of all solid state, ultra-thin, no viewing angle limitation, fast response, room temperature operation, easy realization of flexible display and three-dimensional (3D) display, etc., and can significantly save power, making them widely used in the field of flat panel displays. Unanimously recognized as the mainstream technology of the next generation of display. [0003] At present, the main method of ...
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IPC IPC(8): C23C14/24H01L51/56
CPCC23C14/24
Inventor 邹成黄伟
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD